面向微纳加工平台的智能隔振系统切换控制研究

项目名称： 面向微纳加工平台的智能隔振系统切换控制研究

项目编号： No.61203098

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 自动化学科

项目作者： 浮洁

作者单位： 重庆大学

项目金额： 25万元

中文摘要： 微振动对微纳加工和精密测量造成的不良影响日益突出，近年来受到广泛关注。 现有微振动控制主要采用被动隔振技术，但低频抑制效果差；主动隔振已有研究，但能量消耗大，稳定性差，高频抑制效果不理想。为获得更佳的微振动抑制效果，申请人提出采用磁流变弹性体和压电陶瓷材料设计一种半主动/全主动可切换控制智能隔振器，并采用模糊神经网络进行逆模型建立和参数辨识，结合多模态控制思想实现全频段的振动抑制，具有体积紧凑、控制响应快、定位精度高等特点，为解决微振动控制问题进行了创新性探索。申请人还将切换控制理论与仿人智能控制理论相结合，制定了隔振系统的切换控制策略，实现微纳加工平台的多姿态振动控制，并利用dSPACE系统和电动振动台建立软硬件仿真平台以验证控制效果。该项目研究对微振动控制理论的发展具有重要学术意义和实用价值，同时为智能材料（压电陶瓷、磁流变弹性体）在微纳加工和精密测量中的应用提供理论依据和技术储备。

中文关键词： 半主动/全主动智能隔振器；模糊切换控制；神经网络；磁流变弹性体；压电陶瓷

英文摘要： Along with the development of micro nano fabrication and precision measurement technology, it had been a difficult and hot problem of desiderate to solve that how to effectively reduce the vibration of the adverse effects. The existing micro vibration control methods mainly include active and passive vibration isolation method. However, the two methods have some disadvantages. The active one has large energy consumption, poor stability and high frequency suppression effects. Correspondingly, the passive one has poor low frequency suppression effects. In order to obtain better vibration suppression effect, by using magnetorheological elastomers and piezoelectric ceramic material, this project designs a semi-active /full-active switching control intelligent isolator. Inverse modeling and identification and studied by using fuzzy neural network. Combined with multi mode control scheme, full frequency vibration suppression is achieved. It has a lot of advantages, such as reduced size and compactness, quick control response, and positioning precision. The presented method to micro vibration control research is the innovation exploration. Combined with switch control and intelligent control theory, develop switching control strategy for isolation system is developed, which helps to realize multi attitude vibration con

英文关键词： Semi-active /full-active intelligent isolator；Fuzzy switch control；Neural network；Magnetorheological elastomers；Piezoelectric stack actuator