单片集成三维磁场/三轴加速度/微压多功能传感器模型构建与集成化研究

项目名称： 单片集成三维磁场/三轴加速度/微压多功能传感器模型构建与集成化研究

项目编号： No.61471159

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 赵晓锋

作者单位： 黑龙江大学

项目金额： 79万元

中文摘要： 本项目针对多功能物理量传感器单片集成化问题，利用纳米硅薄膜具有高应变因子、高载流子迁移率和宽光学带隙的优异物性，采用异质结硅磁敏三极管和纳米硅薄膜晶体管相结合方法，提出三维磁场/三轴加速度/微压多功能传感器单片集成化结构模型。在此基础上，建立三维磁场、三轴加速度和微压多功能传感器单片集成化理论，探究多功能传感器各物理量敏感机理、特性及相互交叉影响问题，达到单片集成多功能传感器各信息量敏感单元优化设计。基于微机械加工技术（MEMS）和纳米硅薄膜原位掺杂技术，在<100>晶向高阻单晶硅上实现多功能传感器芯片单片集成化工艺制作和封装，该结构能够同时对磁场、加速度和压力三个物理量（7个信息量）进行测量。因纳米硅薄膜物性优异，单片集成多功能传感器具有高灵敏度、交叉干扰小和温度稳定性好等优点，为传感器多功能化、小型化和集成化及薄膜型传感器研究奠定重要基础，在航空航天、环境监测和医疗等领域具有重要应用。

中文关键词： 单片集成；三维磁场传感器；三轴加速度传感器；微压传感器；多功能传感器

英文摘要： In this project, a monolithic integrated sensor model with three-dimensional magnetic field, three-axis acceleration and micro-pressure, is proposed aimed at solving the problem of monolithic integration of multifunctional physical sensor. The sensor model is constructed based on that nc-Si thin films have excellent physical properties of high gauge factor, high carrier mobility and wide optical band-gap, and it also adopts the method by combining the heterojunction magnetic sensitive transistor with nc-Si thin films transistor. Above that, a theory of the monolithic integration of the multifunctional sensor, which can realize the functions of three-dimensional magnetic field, three-axis acceleration and micro-pressure, is proposed. Through exploring the sensitive mechanism, characterization and cross-interference problems of the multifunctional sensor, it can be realized that the design of the message sensitive units of the multifunctional sensor is improved. Through microelectromechanical systems (MEMS) and in-situ doping of nc-Si thin films, the fabrication and packaging of the monolithic multifunctional sensor chip is achieved on the <100> orientation silicon with high resistivity. The structure can measure three physical quantities (seven information contents)--magnetic field, acceleration and pressure, at the same time. Because of the good physical characteristics of nc-Si thin films, the monolithic multifunctional sensor has the advantages of high sensitivity, low cross-interference and superior temperature stability, which lays a foundation for the multi-functionalization, miniaturization and integration of the sensor and the research of thin film sensor. It has very important applications in the fields of aerospace, environmental monitoring and health, etc.

英文关键词： monolithic integrated;3D magnetic field sensor;three axis acceleration sensor;micro pressure sensor;multifunctional sensor