可同时测量磁场幅度和方向的微机械磁场传感器基础研究

项目名称： 可同时测量磁场幅度和方向的微机械磁场传感器基础研究

项目编号： No.61201032

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 电子学与信息系统

项目作者： 陈洁

作者单位： 东南大学

项目金额： 25万元

中文摘要： 磁场传感器应用十分广泛，特别在交通航海和通讯导航定位的发展尤为迅速。目前基于Hall效应和磁阻效应的半导体磁场传感器仅能测量磁场大小，为了测量磁场方向，需要多个传感器的组合，现在以MEMS技术开发的磁场传感器正广泛应用。本项目创新性地提出一种基于模态的MEMS磁场传感器方案，利用传感器结构不同模态下的不同振动方式，测量磁场大小和方向。该研究首先利用相关力学理论建立传感器的结构模型，用ANSYS软件对模型进行验证，接着对传感器的结构优化设计、引线框架的设计和塑封料的选择，实现多芯片的系统级封装设计。通过对本项目的研究，不仅提出了一种新的磁场传感原理为磁场测量提供新途径，也提出了一种新的磁场检出方法，并在实现传感器高可靠性封装上具有重要的实用价值。

中文关键词： 磁场；振动；模态；模型；

英文摘要： The magnetic field sensor is widely used especially in traffic navigation and communication. The sensors such as Hall-effect, magnetoresis tive, can only measure the magnitude of magnetic field. Several sensors, which are used to sense the magnitude of the magnetic field, are combined to measure the direction.Now the MEMS magnetic sensor are under study. A MEMS magnetic field sensor based on modal programs is proposed innovatively in this project. The direction and magnitude of magnetic field is detected by measuring the vibration amplitudes of the different modes of the mechanical beam. The model of the mechanical coupling are established using the relevant mechanical theory, validated using the ANSYS finite element software. And then the optimized structure of the sensor design, the design of the lead frame and plastic material selection are studied before multi-chip system in package. Not only a new principle of magnetic field sensing for measurements but also a new magnetic field detection method is proposed in this project. At the same time, the study is of important practical value in the sensor package.

英文关键词： magnetic；vibrationq；mode；model；