基于MEMS技术的直流合成电场传感器研究

项目名称： 基于MEMS技术的直流合成电场传感器研究

项目编号： No.51477089

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 电工技术

项目作者： 余占清

作者单位： 清华大学

项目金额： 92万元

中文摘要： 空间直流合成电场是表征直流输电线路和高压设备电磁环境效应的重要参数。由于电位高且空间存在带电粒子，目前使用的场磨不能测量空间场强。微机电系统（MEMS）电场传感器具有扰动小、精度高、便于集成的优点，但目前还无法解决空间电荷的影响，不能用于直流合成电场测量。本项目基于微机电系统（MEMS）和集成微电子工艺，研究适应复杂、恶劣环境及高强度的全场域、独立式、芯片级直流合成场强传感器。重点研究直流离子流场中介质表面和内部直流电场特性，解决离子流和电磁干扰对测量结果的影响；研究适用于强直流电场检测的电驱动共振式微机械结构，设计复合式多单元MEMS结构和表面电荷控制结构；研究微信号采样和处理电路及基于中程射频技术的无线供能和信号传输电路，提出结构-电路一体化集成技术方案，完成传感器制备和优化。成果将解决空间直流合成场强测量难题，可广泛应用于直流输电系统的电磁环境评估、在线监测和高压智能设备量测。

中文关键词： 合成电场；传感器；直流离子流；微机电系统；集成电路

英文摘要： DC total electric field has become a major parameter characterizing the electromagnetic environment effects of objects near DC transmission lines, and is also an important consideration factor during DC insulators, cables, GIS equipment designing. Because of the high electric potential and the presence of charged particles, the space field strength is very difficult to measure. The field mill used recently have obvious weakness on reliability, occasion's adaptability and accuracy, cannot used to measure electric field in the space or near other devices. Electric field sensor based on Micro-Electro-Mechanical Systems (MEMS) has advantages such as low electric disturbances, high precision, ease of integration, but has not solve the problem of space charge impact, and the function and signal transmission cannot meet the requirements of high-potential measurements. Based on MEMS and integrated microelectronics technology, this project focuses on the new stand-alone micro total electric field measuring device, adapting to the harsh environments, high intensity fields and whole domain measuring. An Electrically driven micro-machined resonant structure for the strong DC field detection will be designed, as well as the vibrational structure, drive electrodes , detecting electrodes and the sensing electrodes. The electric field formation mechanism in the media excited by the ion flow field under HVDC Transmission Line will be studied. Composite MEMS multi- unit structures and surface charge control structures will be developed, addressing the impact of the ion flow and conducting current on the measurement. The sampling and processing method for the small output current from the structure will be developed, wireless energy supply circuit and signal transmission circuit based on medium-range RF technology will be solved, structure-circuit integrated solutions will be proposed. Based on microelectronic processing technology, the stand-alone chip-level total electric field measurement sensor will be processed and optimized. The results may solve total electric field measurement accuracy and standardization issues，and can be directly applied to the HVDC transmission project construction, EME assessments, online detection and measuring of high-voltage intelligent devices

英文关键词： DC total Electric Field;Sensor;DC Ion Flow;MEMS;integrated circuit