双波长光纤干涉条纹投射三维形貌测量方法研究

项目名称： 双波长光纤干涉条纹投射三维形貌测量方法研究

项目编号： No.51275349

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 段发阶

作者单位： 天津大学

项目金额： 80万元

中文摘要： 相位轮廓术是三维形貌测量的重要手段，动态、高精度相位轮廓测量技术是研究热点之一。本项目拟发展一种双波长光纤干涉条纹投射三维形貌测量新方法，利用波分复用技术、马赫-泽德干涉结构及杨氏双孔干涉原理实现双频干涉条纹投射，利用光纤端面的菲涅尔反射、激光器内调制技术实现干涉臂相位差的精确测量与控制，进而实现投射条纹相位的精确控制。针对动态测量要求及双波长光纤干涉条纹投射的特点，在大调制度正弦相位调制同步积分的基础上，设计了一种基于双波长光纤干涉条纹投射、正弦相位调制的分时同步积分测量新方案，同时利用菲涅尔反射信号实现相位调制度精确控制及基于PGC的干涉臂初相位测量，实现双频相位包裹图的快速获取。为实现步进相移三维形貌测量，提出了一种基于交流小相位内调制技术的干涉臂相位差测量与控制方法，进而实现双频投射条纹的高精度闭环步进相移。采用双频相位去包裹技术并结合光纤干涉条纹投射模型，恢复物体三维形貌信息。

中文关键词： 三维形貌测量；光纤干涉仪；正弦相位调制；相位测量；

英文摘要： Phase profilometry is an important means of three-dimensional(3D) shape measurement, which focuses on dynamic and high-precision phase profile measurement technology. The project intends to develop a new method of dual-wavelength fiber interferometer fringe projected three-dimensional shape measurement. This method takes advantage of WDM technology, Mach-Zehnder interferometer structure and Young's double pinhole interference principle to achieve dual-band interference fringe projection;makes use of the Fresnel reflection on fiber end face and the laser inner-modulation technique to achieve precise measurement and control of the interferometric arms phase, thus achieves a precise control of the projected fringe phase. For dynamic measurement requirements and the characteristics of dual-wavelength fiber interferometer fringe projection, on the basis of the large sinusoidal phase modulation integrating bucket, we design a new time-sharing integrating bucket measurement program based on dual-wavelength fiber interferometer fringe projection and the sinusoidal phase modulation, while utilizing Fresnel reflection signal to realize phase modulation precise control and the measurement of PGC-based interference arm initial phase, finally get access to dual-band wrapped phase map quickly. In order to achieve phase-stepp

英文关键词： Three-dimensional Morphology；fiber interferometer；sinusoidal phase modulating；phase measurement；