飞秒激光三维形貌测量方法研究

项目名称： 飞秒激光三维形貌测量方法研究

项目编号： No.61475162

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 纪荣祎

作者单位： 中国科学院光电研究院

项目金额： 82万元

中文摘要： 极大规模集成电路制造技术和微纳超精加工技术的发展对大尺寸、纳米级三维表面形貌测量技术提出了极大的挑战。传统的三维表面形貌测量方法在测量大尺寸样品时存在诸多局限，如横向视场较小、纵向扫描速度较慢等，难以满足微纳尺度表面三维形貌的大视场快速测量。飞秒激光频率梳光源同时具备高空间相干和低时间相干的特点，在大尺寸样品微纳结构的快速测量中具有传统光源无法比拟的优势。本项目研究飞秒激光三维形貌测量技术，采用非平衡测量光路和分阶段重频微调方法，提高样品扫描测量的速度；采用对测量光斑进行扩束和测量视场匹配的方法，扩大样品的测量视场。研究飞秒激光频率梳三维形貌测量技术，探索新型跨尺度高精度三维表面形貌测量原理，对发展大尺寸样品微纳结构快速测量具有重要意义。

中文关键词： 测试技术；三维表面测量；飞秒光学频率梳；图像处理

英文摘要： The development of large-scale semiconductor integrated circuit manufacturing technology and precise processing technology has brought forward higher challenges for measurement technology of large-size and nanoscale 3D surface topography. There are many limitations such as small field of view and slow scanning rate in vertical direction for detecting large-size samples using conventional methods for measurement of 3D surface topography. Obviously it's unable to meet the increasing requirements by conventional method. Femtosecond optical comb is particularly suitable for 3D large-size surface topography rapid measurement because of its excellent properties of spatial and temporal coherence which traditional optical light sources can't provide. In this project, unbalanced measurement optical path and adjustable repetition rate are adopted to raise scanning speed. At the same time, field of view of this measurement installation is broadened with well-designed light expanding system and FOV matching technology.It's of important significance for rapid measurement of micro-nano scale circuit to study measurement technology of 3D surface topography based on femtosecond optical comb and to explore a new method with high precision for large-size surface.

英文关键词： testing technology;3D surface topography measurement;femtosecong optical comb;image processing