微球测量技术及评定方法研究

项目名称： 微球测量技术及评定方法研究

项目编号： No.51475131

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 机械、仪表工业

项目作者： 黄强先

作者单位： 合肥工业大学

项目金额： 82万元

中文摘要： 随着微细加工技术的快速发展，对三维轮廓的测量要求越来越高。但几何特征尺寸在数微米至数百微米范围内的微器件三维轮廓准确测量问题，尤其是最重要几何形体--微球的测量问题，成为急需解决的科学难题。针对微球测量，有别于现有球体测量方法和技术，本项目拟研究新的测量方法和技术：利用大长径比、顶尖尖锐的钨探针，基于谐振压电敏感元件谐振参数对外力极其敏感的特性，研究可实现大深宽比测量的扫锚探针测量方法和技术；在此基础上，提出差动扫描探针测量方法和技术，实现纳米分辨力的微球三维轮廓测量，并以该测量方法为依据，研究纳米量级精度的微球球度评定方法。在理论研究上，本项目拟基于大长径比的扫描探针技术，通过理论分析、建模仿真和实验验证，建立亚毫米尺度内的、纳米量级精度三维轮廓测量方法和技术；在实验研究上，构建分辨力1nm、重复性10nm的微球三维测量实验系统，并以一体式光纤微探头为实验对象，研究微球测量技术的应用。

中文关键词： 微球；扫描探针；球度误差；三维测量；微纳米测量

英文摘要： With the rapid development and application of microprocessing technology, the requirements of three dimensional (3D) profile measurement become hihger and higher. However, the accurate 3D profile measurement of micro device with the feature sizes from several micrometers to several hundreds of micrometers, especially the measurement of the most important geometric figure - microphere, become a scientific problom to be solved urgently. Being Aimed at the measurement of microphere and different from the current measurement methods and technologies of sphere body, new method and technology are proposed in this project. Using tungsten probe with large aspect ratio and very sharped tip, and based on the characteristics of the piezo-electrical element's resonant vibrating parameters which are sensitive to external microforce, new scanning probe measurement method and technology which can applied to measurement of microstructures with depth-to-width ratio will be proposed. Based on the method and technology, differential scanning probe method and technology will be studied to achive the 3D profile measurement of microsphere with nano resolution. Furthermore, the evalution method of microshpericity with the accuracy of nanometer will be studied based on this method. Theoritically, based on the scanning prope technology with large aspect ratio, the 3D profile measurement method and technology for submeter scale and with nanometer will be established by theorical analysis, modelling and simulation, and experimental verification. Experimentally, the experimental system for the 3D profile measurement of microsphere with the resolution of 1 nm and repetability of 10 nm will be installed. Finally, using an integrated optical fiber micro probe as the experimental object, the application of the microshphere measurement technoloy will be studied.

英文关键词： Micro-sphere;Scanning Probe;Spherity Error;Three Dimension Measurement;Micro/Nano Measurement