用于光束长焦深、超分辨聚焦调制的微光学元件设计及其曲面纳米压印加工技术研究

项目名称： 用于光束长焦深、超分辨聚焦调制的微光学元件设计及其曲面纳米压印加工技术研究

项目编号： No.51275111

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 金鹏

作者单位： 哈尔滨工业大学

项目金额： 80万元

中文摘要： 以激光直写技术中的光束长焦深、超分辨聚焦为背景，开展曲面基底复振幅滤波器微光学元件的设计与加工研究。提出基于余弦函数复振幅滤波器设计模型，适量余弦函数调制环节的引入，将单一焦点在轴向分裂为多个焦点，合理调整各光点轴向分布，实现兼顾长焦深和超分辨聚焦要求的幅滤波器设计；利用柔性纳米压印技术，在光学曲面上构建微细结构，提高复振幅滤波器与传统光学镜组的系统集成度；通过基于非线性有限元分析的迭代求解方法，对柔性平面薄片压模的曲面铺覆变形进行预测，结合双目立体视觉的图像测量实验方法，对数值计算结果予以修正，从而在设计环节予以精确补偿；引入硫醇-烯作为压印胶，利用其固化滞后于体积收缩的特性，通过流动弛豫，对固化过程中体积收缩导致的形貌误差予以补偿。预期实现焦深长度优于10λ，聚焦光场的半高宽优于0.38λ的滤波器设计；及传统光学透镜与微光学元件的集成加工，微纳结构复制精度优于λ/10。

中文关键词： 超分辨聚焦；纳米压印；优化算法；波前调制；

英文摘要： In this project, We design and fabricate complex amplitude filter micro-optics elements(MOE) aimed at the both extended focal depth and super-resolution focusing in laser direct writing technology. We develop a design model for complex amplitude filter in which cosine function is introduced to separate single focus into several focuses axially. Through adjustment of the focuses distribution on the axis, both extended focal depth and super-resolution focusing can be obtained by amplitude filter; soft nanoimprint lithography is employed to fabricate microstructure on curved surface, so that the complex amplitude filter can be integrated onto the surface of optic elements; We proposed an approach to predict the surface deformation of soft mould covered on curved surface, mainly by numerical iteration solution of nonlinear finite element analysis. And numerical result will be used in the mould design after being corrected by vision measurement. Thiol-ene is used as resist, because its curing occurs after its volume shrinkage. Therefore, the fabrication error caused by shrinkage can be compensated by the relaxation of resist in the residue layer. We will complete the design of complex amplitude filter which can be used to focus laser beam with focal depth longer than 10λand full width at half maximum of focus field w

英文关键词： Super-resolution focusing；Nanoimprint；Optimization algorithm；Wavefront modulation；