高效3D 4H-SiC中子探测器的研究

项目名称： 高效3D 4H-SiC中子探测器的研究

项目编号： No.11305029

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 数理科学和化学

项目作者： 钟志亲

作者单位： 电子科技大学

项目金额： 29万元

中文摘要： 相比于气体、闪烁体和常规的半导体中子探测器，SiC中子探测器具有抗高温和耐辐照等优点，因此适用于核反应堆、高能物理实验和外太空等高温高压以及强辐射等极端环境中的中子监测。而利用三维结构的，具有高深宽比SiC结器件阵列，所制备的3D SiC中子探测器，能有效地提高探测器的探测效率。故本项目首次开展3D 高效4H-SiC中子探测器的研究。通过蒙特卡罗方法模拟中子和核反应产生的带电粒子能量损失和射程的研究将得到优化的3D SiC中子探测器结构。再研究3D结构SiC中子探测器制备的关键技术，如高刻蚀速率和低刻蚀损伤的SiC干法刻蚀优化工艺和凹槽结构SiC表面离子注入掺杂工艺。在此基础上，制备出3D结构的SiC 中子探测器样品，并对其进行电学性能研究。

中文关键词： 4H-SiC；中子探测器；干法刻蚀；沟槽；蒙特卡罗

英文摘要： Compared with gas, scintillator and traditional semiconductor neutron detectors, SiC neutron detector offer several important advantages, such as temperature and radiation hardness. For this reason, SiC neutron detector can be used for neutron detector in the extreme enviroment including nuclear reactors, high energy physical experiment and out space. The trench perforated three dimension SiC neutron detector, which contains high depth to width ratio, can effectively improve the detector efficiency of the detectors. So, for the first time, we will carry out the study of three dimension 4H-SiC neutron detectors with high efficiency. To obtain the optimized structure of detectors, we make use of Mente Carlo approach simulating the energy loss of neutrons and charged particles and the range of particles. After that, the key technique of fabricating three dimension SiC neutron detector, such as the optimized dry etching of SiC with high etching rate and low etching damage and ion implantation doping process to the surface of trench perforated SiC, will be systematically studied. Finally, we will fabricate some trench perforated three dimension SiC neutron detectors and caracterize their electrical properties.

英文关键词： 4H-SiC；neutron detector；dry etch；trench；Monte Carlo