A volume-averaged global model is developed to investigate surface-wave discharges inside either cylindrical or coaxial structures. The neutral and ion wall flux is self-consistently estimated based on a simplified analytical description both for electropositive and electronegative plasmas. The simulation results are compared with experimental data from various discharge setups of either argon or oxygen, measured or obtained from literature, for a continuous and a pulse-modulated power input. A good agreement is observed between the simulations and the measurements. The calculations show that the wall flux often substantially contributes to the net loss rates of the individual species.
翻译:中和离子壁通量是根据电阳性等离子体和电阴性等离子体的简化分析描述自行估算的,模拟结果与从文献中测量或获得的气或氧的各种排放装置的实验数据进行比较,以便进行连续和脉冲调控电能输入。在模拟和测量之间观察到良好的协议。计算表明,壁通量往往在很大程度上有助于个别物种的净损失率。