Scanning Tactile Sensor with Spiral Coil Structure Amplifying Detection Performance of Micro-concave

Surface inspection is a delicate process aimed at detecting fine defects, irregularities, and foreign substances at the tens of micrometers level, subsequently excluding products that do not meet the quality standards as defective. Currently, this inspection relies on the tactile senses of skilled technicians, leading to variability in the detection accuracy based on the level of proficiency and experience. Consequently, a standardized method for surface inspection has yet to be established. In response to this issue, we have developed a device capable of amplifying tactile information, allowing for the detection of minute distortions without the need for highly skilled technicians. The experimental results on various small distortions suggest the potential for the quantitative evaluation of these distortions. In the future, the application of this device could contribute to the automation of surface inspection.