基于MEMS工艺的高性能石英加速度计谐振结构特征研究

项目名称： 基于MEMS工艺的高性能石英加速度计谐振结构特征研究

项目编号： No.61501236

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 裴荣

作者单位： 南京理工大学

项目金额： 21万元

中文摘要： 围绕目前惯导系统对加速度计性能的要求：体积小、成本低、精度高和可靠性极高，本项目研究以振动学、惯性技术与MEMS工艺技术为基础的基于谐振原理设计的石英加速度计，它是把力敏感振动石英梁作为敏感元件并能直接数字输出。为获得高Q因数的高质量谐振特性，采用理论分析和有限元仿真研究其振动梁的变形和应力，在此基础上对石英加速度计进行静、动态试验，研究谐振机理，建立多物理场耦合条件下的关键结构分析模型，确定影响谐振性能的特征参量，提出减小结构能量损耗和隔离系统的方法，以提高加速度计测量精度。另一方面，在MEMS工艺基础上，结合振动学、压电学理论和有限元优化方法，对关键结构参数进行深入研究，建立优化设计规则，实现低成本、小型化和高效能的一体化设计。本项目为提高加速度计的实际性能提供了一种新方法，对提高我国新型加速度计技术、尤其在航天航空和军事武器领域的应用，具有重要的理论研究意义和实际应用前景。

中文关键词： 惯性传感；石英加速度计；谐振；结构设计；机–电耦合

英文摘要： With the development of the inertial technology and its new tendency, low complexity, low cost, high accuracy and high anti-interference have been needed by the inertia component. Avoiding bonded techniques of traditional quartz flexible accelerometer，quartz vibrating beam accelerometer will be studied which belongs to a kind of micromechanical inertial instrument. Vibrating Beam Accelerometer is virtually a solid state accelerometer with an inherent digital output, which utilizes piezoelectric quartz as the basic material of sensing elements. Domestic and foreign structure analysis discovers that its sensitive girder has energy loss or shielding system is large. It affects the accelerometer measuring accuracy and the volume. In order to obtain the high Q factor and the high grade resonance characteristic, the structure, characteristics and operation principle of the quartz vibrating beam accelerometer will be analyzed. Essential structure mechanics model will be established and influence resonance performance characteristic parameter will be determined. Based on the research mentality of structure energy, one kind surpasses the double beam's new push-pull structure will be proposed. In view of the structure and the craft most superior match, proposes the low cost, miniaturized and the high efficiency monolithic body structure design method. And the electromechanical coupling modal of quartz vibrating beam accelerometer is established. These will be advantageous in realize the most superior structure disposition. This project provides one new research technique to enhance accelerometer's actual performance. It also enhances our country new accelerometer technology, especially in astronautics aviation and the military hardware domain application, which has important fundamental research significance and practical application prospect.

英文关键词： inertial sensor;quartz accelerometer;resonant;structure design;mathematic mode