基于两种非线性理论的新型MEMS振动能量收集芯片研究

项目名称： 基于两种非线性理论的新型MEMS振动能量收集芯片研究

项目编号： No.61274119

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 无线电电子学、电信技术

项目作者： 欧毅

作者单位： 中国科学院微电子研究所

项目金额： 84万元

中文摘要： 创新性地采用杜芬非线性振动原理来扩展响应频谱，并采用非线性同步阻尼开关技术来提高输出功率，基于以上两项关键创新，设计和制作新型压电式MEMS振动能量收集器。从而克服目前常规MEMS能量收集器件的单频点响应，功率输出低的缺点。此外，创新性的提出采用微波烧结的方式制备高性能PZT薄膜，并提出了一种圆片级真空封装方案，将MEMS能量收集器的制造和封装同时在晶圆上完成。主要研究内容包括：新型MEMS压电振动能量收集器的工作原理分析；收集器的结构设计研究；振梁应力控制研究；收集器的光刻版图设计、工艺流程设计及加工；收集器圆片级封装方案研究；同步阻尼开关系统研究及设计；新型MEMS压电振动能量收集器原理验证及关键性能指标评测。本项目将为MEMS能量收集技术发展提供新的思路，为突破振动式能量收集的技术瓶颈提供新的解决方案并奠定理论研究基础。器件研制成功后可作为不间断长效电源广泛应用于无线传感节点网络。

中文关键词： 非线性；压电材料；MEMS；同步阻尼开关技术；宽频

英文摘要： Purpose of this application is to develop a novel MEMS vibration harvester, which craetively employes the Duffing nonlinear vibrational theory to extent frequency resonant bandwidth, and the synchronized switch dmaping (SSD)technolog is also adopted to improve the output power. In contrast to conventional MEMS harvesters, those two new nonlinear technologies help overcome disadvantages of narrow bandwidth and low output power. Moreover, a now process is aslo purposed to sinter Lead Zirconate Titanate (PZT) film by using microwave. By means of the wafer level packaging (WLP), fabrication and packaging can be done simultaneously on a wafer. The main research content includes: analysis on work principle of the nonlinear MEMS vibration harvester, nonlinear structure design, stress control of vibrational beams, mask layout design of the harvester, fabrication process flow design, research on the fabrication and packaging, research and design of the SSD system,verification and evaluation of the novel MEMS harvester. This project offers not only new ideas for the development of the MEMS harvesters, but also fresh solutions to break through the technical bottleneck of vibration energy harvesting. And the successfully fabricated MEMS harvesters can be widely used in the wireless sensor network as an uninterruptible power

英文关键词： nolinear；piezoelectric material；mems；Synchronized Switch Harvesting with Inductor；wide frequency