智能高速机床MEMS高频加速度传感器研究

项目名称： 智能高速机床MEMS高频加速度传感器研究

项目编号： No.51275402

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 赵玉龙

作者单位： 西安交通大学

项目金额： 80万元

中文摘要： 智能制造装备特别是智能高速机床已成为先进制造技术竞争的一个制高点，是国家重点发展的新兴行业之一。而智能装备的关键功能"感知"需要高性能的传感器予以支持。本项目旨在解决智能机床中高速、超高速主轴这一关键部件的高频振动测试问题，研制一种高频硅微压阻式加速度传感器，以精确获取主轴系统故障监测与诊断过程中的高频振动信号。项目拟在传感器的理论分析与结构设计、芯片加工工艺、封装技术、性能测试及实际振动测试实验四个方面展开研究，通过解决加速度传感器中高频响应与高测量灵敏度兼容的复合多梁结构设计与优化、结构尺寸高精度加工以及面向工业实际测试的传感器封装等方面的科学与技术难点问题,进行高频振动加速度传感器的研制，为高速、超高速主轴系统的振动测试提供高频器件支持，推动机床主轴系统乃至制造装备的智能化发展。

中文关键词： 微机电系统；加速度传感器；智能机床；高频响；

英文摘要： Intelligent manufacturing equipment，specifically high-speed machine tool, has become one of the commanding points in the advanced manufacturing competition, which is a new industry our country will emphatically develop. The "feeling" is one of the key functions for the intelligent manufacturing equipment and needs high-performance sensor to realize. This project mainly focuses on the problems in the high/ultra-high speed spindle vibration measurement and will develop a high-frequency silicon micro-accelerometer to accurately detect the vibration signals in the spindle system's fault monitoring and diagnosis. The studies will be carried out on the theoretic analysis, structure design, fabrication process, packaging technique, vibration measurement. The high-frequency accelerometer could be developed through solving the problems in the compatibility between the high response frequency and high measurement sensitivity, accurately controlling of the structural dimensions during the fabrication and the effectively packaging for the vibration measurement in practice. The developed sensor could act as a supporter for the high/ultra-high speed spindle vibration measurement, and promote the intellectualization of the spindle system and then the manufacturing equipment.

英文关键词： MEMS；Accelerometer；Intelligent machine；high frequency；