高频高精度横向敏感加速度传感器及其封装应力隔离研究

项目名称： 高频高精度横向敏感加速度传感器及其封装应力隔离研究

项目编号： No.51505358

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 机械、仪表工业

项目作者： 刘岩

作者单位： 西安电子科技大学

项目金额： 20万元

中文摘要： 高频高精度加速度传感器在高端智能装备、超高速武器等领域具有广泛的应用前景。针对加速度传感器研发中存在的固有频率与灵敏度相互制约、测量精度受封装应力和结构自身特性影响的问题，本项目提出了一种具有封装应力隔离结构的横向敏感加速度传感器。以具有大结构常数(即固有频率的平方乘以结构最大变形与输入加速度的比值)的横向敏感结构使传感器兼具高固有频率和优良灵敏度；通过片上集成的隔离结构将压阻元件与芯片基体分隔以减小封装干扰应力对传感器精度的影响；保证结构对称性和变形线性度，减小传感器横向交叉干扰，提高传感器测量精度。项目通过对器件结构设计与优化、芯片制造与封装、性能测试与验证的研究，重点突破传感器高频化与封装应力高效隔离的共容及传感器全结构建模与优化两个关键科学问题，为高频高精度加速度传感器的研制打下理论和技术基础，为各类传感器研制过程中的干扰应力消减提供技术参考。

中文关键词： 加速度传感器；高频；高精度；封装应力隔离；结构设计与优化

英文摘要： Accelerometer with high resonant frequency and high measurement accuracy have been widely used in the fields like advanced intelligent equipment and ultra-high-speed weapons. Focused on the interactivity between resonant frequency and sensitivity and the interference on the measurement accuracy from packaging stress and geometrical inhere limitation, this project proposes a high-performance planar piezoresistive accelerometer with stress-isolation structure to solve these problems. The planar sensing structure with large geometrical constant(square of resonant frequency multiplying the ratio of structural maximum deformation to applied acceleration) is adopted to accomplish the coexistence of high frequency and high sensitivity in one device. The stress-isolation structure is adopted to separate the transducing element from outer frame of sensor chip, by which the transmitting path of packaging stress is obstructed to reduce its influence on sensor accuracy. Moreover, the cross-axis sensitivity can be diminished by good symmetry of planar structure. Linearity of structural deformation is also considered. By investigating the device structural design, fabrication and packaging of sensor chip and testing experiments, this project breakthroughs the key scientific problems involving the modelling and optimization for the sensor overall structure and compatibility between the high-frequency parameter and effectiveness of packaging stress isolation. Accomplishment of this project can provides the theoretical and technical foundation to the development of high-frequency and high-accuracy accelerometers, and can be an available approach for diminishing the interferential stress in the development of different sensors.

英文关键词： Accelerometer;High-frequency;High-precision;Packaging stress isolation;Structural design and optimization