用于第三代基因测序系统的石墨烯纳通道跨尺度集成制造原理及方法研究

项目名称： 用于第三代基因测序系统的石墨烯纳通道跨尺度集成制造原理及方法研究

项目编号： No.61274114

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 无线电电子学、电信技术

项目作者： 孙立涛

作者单位： 东南大学

项目金额： 91万元

中文摘要： 5纳米以下三维纳通道的高精度集成制造技术是制约第三代基因测序系统研究和发展的一个重要环节，无论纳通道的使用寿命还是制造精度都亟待显著提高。本项目选择具有超强力学性能的石墨烯作为纳通道集成制造的主要材料，借助新一代皮米分辨球差校正透射电子显微镜和多种微纳加工技术相融合的方法，开展纳通道跨尺度集成制造的相关原理和方法研究，实现径向和轴向尺寸均在5纳米以下的精度小于1纳米的石墨烯纳通道的集成制造。通过本项目的研究，将在原子尺度上探索材料加工过程中结构的演变，尤其是表面/界面结构的演变规律，揭示纳米材料加工、成形及改性的原理与相关尺度效应；不仅要为研制出低成本、高精度、高可靠性的第三代基因测序系统提供可靠的设计和制造手段，还要为纳米制造过程中新材料的使用和评价提供有效的表征和检测方法，最终建立集纳米加工、性能测试和结构表征于一体的多功能纳米实验研究平台。

中文关键词： 纳米集成制造；基因测序系统；石墨烯纳通道；原位电子显微学；

英文摘要： Precise, integrated manufacturing technique of sub-5 nanometer, three-dimensional nanochannels is the crucial technique which limits the study and development of the third-generation gene sequencing system. The precision as well as the lifetime of nanochannels need to be substantially improved. We herein propose a study on the theory and the fabrication technique of nanochannels, based on graphene as the key material. The proposal combines the newest generation of transmission electron microscope - equipped with an abberation corrector and has a resolution of picometers - with various micro- and nanofabrication techniques. The final purpose is to realize the integrated fabrication of graphene nanochannels, sub-5 nanometers - both axially and radially - with a precision of <1 nanometer at the mean time. Through this study, structural evolution of the material during fabricating process will be demostrated, especially on the surface/interface; theory on fabrication, molding and modification of nanomaterials as well as the scale effect will be illustrated. We are not only aiming at providing a convincing designing and fabricating method for a low-cost, highly precise and reliable gene sequcing system, but also finding a solution to precisely characterize and evaluate the new materials used during nanofabrication.

英文关键词： Nano-integrated manufacturing；Gene sequencing system；Graphene nanochannel；In-situ electron microscopy；