紫外-可见-近红外全波段抗反射三维微纳结构的构筑

项目名称： 紫外-可见-近红外全波段抗反射三维微纳结构的构筑

项目编号： No.21273092

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 数理科学和化学

项目作者： 吕男

作者单位： 吉林大学

项目金额： 82万元

中文摘要： 在材料表面构筑亚波长微结构是降低界面光反射从而提高入射光利用率的一个有效途径。然而利用通常的二维微结构难以实现全波段（紫外-可见-近红外）抗反射。本项目拟通过在单晶硅表面制备三维微纳结构，实现由紫外至近红外区域的全波段抗反射。首先基于光刻和纳米压印的方法，利用湿法刻蚀在单晶硅表面制备微米尺度的有序结构；然后通过水热合成方法在微米有序结构表面生长ZnO纳米结构，从而得到三维微纳结构；再结合实验与理论模拟，研究并揭示三维微纳结构尺寸、周期等结构特征与其抗反射波段之间的关系，从而为具有全波段抗反射性能的三维微纳结构的设计和制备奠定理论和实验基础。

中文关键词： 构筑；抗反射；微纳结构；反射率；波段

英文摘要： To fabricate subwavelength structures on material surfaces is one of the most efficient approaches for enhancing the utilizaiton of incident light by suppressing the reflection on surfaces. However, it is difficult to suppress the reflection significantly in the waveband of UV-VIS-NIR by 2D microstructures. In this project, 3D micro-nano structures will be fabricated on mono-crystal silicon to suppress the reflection in the waveband of UV-VIS-NIR. Firstly,ordered microscale silicon pyramids will be created on silicon surface by wet etching with the polymer masks, which are patterned with photolithography or nanoimprint lithography. And then the 3D micro-nano structures will be obtained by growing ZnO nanostructures on the surfaces of silicon pyramids with hydrothermal synthesis. The relationship between the surface features of the structures and the antireflective waveband will be investigated and illustrated based on the combination of experiments and theoretical simulation. This study will lay the theoretical and experimental foundations for designing and the fabrication of antireflective structures for the waveband of UV-VIS-NIR.

英文关键词： fabrication；antireflection；micro/nano structure；reflectivity；waveband