高度混合制程的批间控制与性能评估

项目名称： 高度混合制程的批间控制与性能评估

项目编号： No.61273142

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 自动化技术、计算机技术

项目作者： 潘天红

作者单位： 江苏大学

项目金额： 75万元

中文摘要： 随着半导体产业的发展，晶圆生产已从最初的单一模式发展到现在的多产品共线的高度混合生产形态，这对控制系统的设计与评估都提出了新的挑战。本项研究在批间控制的框架下，深入研究高度混合制程的机台效应、产品效应、及其交互效应，提出晶圆品质模型辨识与非线程的状态估计算法；在此基础上，给出EWMA控制器调节参数与产品数量之间的关系矩阵，以改善量少产品的质量；并研究在信息传输的随机时延条件下，批间控制器稳定性条件与鲁棒性设计方法；协同先进统计理论，发展混合制程性能评估与故障诊断方法；结合典型半导体制程，开展实验研究，形成一种面向实际需要的、系统化的半导体混合制程的模型辨识与批间控制器设计方法。由于直接面向实际工业生产需要解决的难点问题，本项研究具有极大的应用价值，且研究内容属于过程控制与半导体制造的交叉领域，亦具有很强的创新性。

中文关键词： 批间控制；虚拟测量；统计分析；多率系统；半导体制造

英文摘要： With the development of semiconductor manufacturing industry, production resembles a high-mix automated assembly line in which many similar products with slightly different specifications are manufactured step-by-step, and a complicated physiochemical batch process is performed by a number of tools in each step. There are many challenges in the modeling and control of the high-mix production systems. In this project, several novel identification and control algorithms are presented under the run-to-run control framework. Firstly, based on identification of tool-effect, product-effect and their interactive effect, a novel quality model and non-thread state estimation method are developed. Then, a relationship between the discount factor and the manufacturing frequency of wafer is built to improve the quality of low frequency products. Thirdly, the stability and robustness of EWMA controller are derived to overcome the lag between the processing and measurement of wafer at a manufacturing step. Finally, a performance assessment and fault detection & classification are developed using the advance statistical theories. Several numeral simulations and industrial applications are provided to illustrate the importance of considering methods in the high-mix production system. In the end, a series of practiced and syste

英文关键词： Run to Run control；Virtual metrology；Statistical analysis；Multi-rate system；Semiconductor manufacturing