基于散射SNOM的超分辨成像光场的检测方法研究

项目名称： 基于散射SNOM的超分辨成像光场的检测方法研究

项目编号： No.61307013

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 无线电电子学、电信技术

项目作者： 何家玉

作者单位： 中国科学院光电技术研究所

项目金额： 22万元

中文摘要： 超分辨成像光场是指局域在超分辨成像器件表面的倏逝波光场信息，它只能够存在于器件的表面，离开表面以后强度迅速衰减，导致传统的成像检测方法无法使用。目前，倏逝波成像光场的检测一般采用光刻胶记录的方法或利用开孔式扫描近场光学显微镜探测的方法。前者受到激发波长、曝光等因素影响，导致光场检测准确性、稳定性降低，后者则主要受到光学分辨力极限和低光传输效率的制约。本项目基于散射式扫描近场光学显微镜Scattering-SNOM(Scattering-Scanning Near-field Optical Microscopy)研究超分辨成像光场的强度分布、相位变换以及偏振性质等参数的表征分析方法，建立一种能够直接对超分辨成像光场进行检测的新方法。通过研究近场探测散射源与倏逝场相互作用机理，分析散射源对倏逝场本身造成的扭变程度，探究近场光学信号的有效提取和准确识别，为超分辨成像器件的研究提供有效表征方法。

中文关键词： 超分辨成像；散射扫描近场光学显微镜；近场光学检测；；

英文摘要： Super resolution imaging light filed is the near field light that highly localized around the surface of super resolution imaging device. It can only exist on the surface of the devices, and decay extreme fast as it go outs of the surface. Highly localized properties of the light field lead to hard detection by conventional optical lens. There exist two methods of near field light detection at present, one is via photoresist exposure process, and the other is via conventional SNOM technique. But both two approach can`t make the accurate detection of near field light available. We will use scattering SNOM to investigate the light distribution on the image plane of the super resolution imaging device. The basic principle of the interaction between probe tip and near filed light will be comprehensively studied. The influence of probe tip`s morphology and properties on the detection of the near field via the tip`s perturbation to evanescent wave and the suppression of the background light noise are going to be investigated to obtain the accurate near field light intensity, phase change and polarization. The near field light distribution and metal film surface properties of the exact position will be detected in-situ and synchronously using scattering SNOM. The correlation between metal film surface properties and im

英文关键词： Super resolution imaging；scattering-SNOM；Near-field optical detection；；