阵列式径向偏振共焦扫描超分辨测量方法与理论研究

项目名称： 阵列式径向偏振共焦扫描超分辨测量方法与理论研究

项目编号： No.51475111

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 机械、仪表工业

项目作者： 黄向东

作者单位： 哈尔滨工业大学

项目金额： 80万元

中文摘要： 针对阵列共焦系统中固有的耦合叠加效应和平移效应所引起的系统分辨力下降的问题，提出一种具有高密集度、高分辨力和高噪声抑制能力的阵列式共焦扫描传感方法。研究内容：1）建立基于矢量衍射理论的阵列径向偏振光照明下衍射光场成像模型，通过调制阵列点光源光场分布特性，提高系统三维空间探测能力；2）基于闪耀特性通过空间光调制器动态改变光栅结构，以实现准直光连续偏转和高密集度阵列大范围共焦扫描测量，同时抑制点光源阵列相邻光路之间的耦合效应；3）提出一种收集光路对称移焦的连续相位光瞳滤波器优化方法，并通过偏振模式转换方法改善聚焦光斑光强分布特性，提高系统的三维分辨能力扩大测量范围，同时抑制共模干扰。4）主要技术指标，轴向分辨力为20nm，横向扫描间隔0.2um，一次成像225个点。该项目的完成可解决阵列共焦系统中存在的高密集测量、宽视场与三维分辨力之间的矛盾；使共焦系统阵列化、数字化，并拓展其应用领域。

中文关键词： 传感器；测量仪器；光学测量；共焦

英文摘要： To address the problem of array confocal system's resolution decline which is caused by the system inherent coupling superposition and panning effects, we propose a high-density, high-resolution and high noise immunity of the array confocal scanning and sensing method. Research: 1) Establish diffracted light field imaging model under polarized light of array radial polarization based on vector diffraction theory, improve the ability to detect three-dimensional space of the system by modulating the optical field distribution characteristics of point source array. 2) Dynamic change the grating structure through the spatial light modulator based on the blazed characteristics, in order to realize the collimating light deflection in succession and complete a wide range of high-density arrays of confocal scanning measurement, while suppressing the point light source array optical coupling effects between adjacent. 3) Present a method of collecting continuous phase pupil filter optimization of optical symmetrical shift focus, in order to improve the properties of the focusing spot of the light intensity distribution through the polarization mode conversion method, improve the ability to distinguish the three-dimensional system, expand the measurement range and suppress common mode interference. 4) There are three main technical indicators: the axial resolution is 20nm, the horizontal scanning interval is 0.2um, an imaging contains 225 points. If the project is complete, we can solve the contradiction among high-density measurements, wide field of view, and three-dimensional resolution, they all exist in an array of confocal system; the project enables confocal system array, digitization, and expand its application areas.

英文关键词： sensor;measurement instrument;optics measurement;confocal