基于多层膜波带片的同步辐射硬X 射线纳米聚焦方法与关键技术研究

项目名称： 基于多层膜波带片的同步辐射硬X 射线纳米聚焦方法与关键技术研究

项目编号： No.U1432244

项目类型： 联合基金项目

立项/批准年度： 2015

项目学科： 数理科学和化学

项目作者： 朱京涛

作者单位： 同济大学

项目金额： 320万元

中文摘要： 硬X 射线显微是生物、医学、材料、物理与化学等研究领域重要的研究工具，硬X射线会聚光斑的大小直接关系到显微分析的分辨率和灵敏度，研制出高质量的纳米聚焦光学元件是实现高分辨率硬X射线显微技术的前提条件。如何获得更小聚焦光斑是国际各X射线光学研究中心的研究热点。X射线多层膜波带片是目前会聚硬X射线较为理想的新型光学元件，美国阿岗、布鲁克海文、英国钻石等同步辐射光源正在积极开展硬X射线多层膜波带片纳米聚焦方法研究，迄今为止，尚处于原理研究阶段，面临分辨率与应力等基础物理与关键技术难题。本项目围绕上海光源二期与未来北京光源预研项目应用需求，深入研究多层膜波带片纳米聚焦方法，发展基于应力优化与高级次衍射多层膜波带片的设计理论，探索薄膜应力形成机理及其补偿新机制，研制出30nm分辨率的硬X射线多层膜波带片，并用于同步辐射硬X射线纳米聚焦系统，为我国同步辐射纳米聚焦应用研究提供关键光学元器件与技术支撑。

中文关键词： 同步辐射；硬X；射线；纳米聚焦；多层膜波带片；应力

英文摘要： Hard X-ray microscopy analysis is an important research tool for biology, medicine, and material, physical and chemical fields. The focusing size of hard X-ray directly relates to the resolution and sensitivity of microscopy analysis. Developing high performance nanometer focusing optical elements is the precondition for hard X-ray microscopy. How to reduce the focusing size of X-ray is the research hotspot topic in X-ray central in the world. X-ray multilayer zone plate is the novel and ideal optical element for hard X-ray focusing, now. Synchrotron radiation light sources in Argonne, Brookheaven National labs in USA, and Diamond synchrotron radiation in UK, are developing hard X-ray nanometer focusing research basing on multilayer zone plate. Now, this research is still in principal phase. Some foundational physics problem and technology difficulty are required to study. In order to satisfy the requirements of the second phase of Shanghai synchrotron radiation facility and Beijing light source developing project, the hard X-ray nano-meter focusing method will be deeply studied in this project. New design method will be developed basing on stress optimization and high-order diffraction. Stress mechanics and compensation mode will be investigated. Multilayer zone plate will be produced with 30nm resolution, then, nano-meter focusing system will be performed for synchrotron radiation beamline. The synchrotron radiation hard X-ray nanometer focusing system will be setup basing on the multilayer zone plate.

英文关键词： synchrotron radiation;hard X-ray;nanometer focusing;multilayer;stress