石油勘探MEMS加速度计接口ASIC关键技术研究

项目名称： 石油勘探MEMS加速度计接口ASIC关键技术研究

项目编号： No.61204121

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 信息四处

项目作者： 尹亮

作者单位： 哈尔滨工业大学

项目金额： 25万元

中文摘要： 本课题主要完成石油勘探MEMS加速度计接口ASIC芯片的低噪声、低谐波失真参数的相关研究。针对5阶sigma-delta结构MEMS加速度计，研究积分器前级噪声、量化噪声、系统稳定性等参数之间的折中优化条件。针对机械敏感结构失配、敏感前级失调、采样噪声混叠等非理想特性建立MEMS加速度计噪声、谐波失真模型。完成电路噪声与量化噪声之间的非线性混叠效应的理论分析及验证。结合sigma-delta噪声分析、环路稳定性条件，分析MEMS加速度计谐波失真的优化参数范围。提出一种MEMS加速度计静电力谐波失真自检测方法，针对方法中微机械结构失配、分时反馈时间比例、非线性电路参数等误差因素建立自检测方法的误差源数学模型。在上述理论模型的基础上完成接口ASIC流片制作，实现对数字sigma-delta结构MEMS加速度计噪声、谐波失真理论模型验证，为石油勘探MEMS加速度计设计提供理论指导。

中文关键词： ASIC；Sigma Delta；加速度计；微电机械系统；低噪声

英文摘要： How to realize low noise and low harmonic distortion of interface ASIC will be studied in this project, which is applied in MEMS accelerometer for oil exploration. For a 5 order sigma-delta structure of MEMS accelerometer, the trade-off of integrator noise, quantized noise, system stability will be analyzed. The noise model and harmonic distortion model of MEMS accelerometer will be set up because of nonideal character of mismatched sensor element, offset of front-end sensing circuits, sampling noise aliasing and so on. Nonlinear aliasing effect of circuits noise and quantized noise will be theoretically analyzed and verified. Optimized factor range of harmonic distortion of MEMS accelerometer is supplied, which is based on noise analysis theory, closed-loop stability condition. A new harmonic distortion self-test method based on electrostatic force is proposed. The error source model of self-test method is set up, which is composed of MEMS sensor element mismatch, time proportion of time-sharing feedback, nonlinear circuits parameter and so on. The interface ASIC of MEMS accelerometer is manufactured, and the theoretical analysis of digital sigma-delta structure for MEMS accelerometer is verified by test result, which provide the theoretical guidance for MEMS accelerometer for oil exploration.

英文关键词： ASIC；Sigma Delta；accelerometer；MEMS；low noise