基于单片SOI硅片的地震检波器用新型微加速度传感器研究

项目名称： 基于单片SOI硅片的地震检波器用新型微加速度传感器研究

项目编号： No.41304143

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 天文学、地球科学

项目作者： 周晓峰

作者单位： 中国科学院上海微系统与信息技术研究所

项目金额： 25万元

中文摘要： 地震勘探是目前最常用的石油勘探方法之一。以微机电（MEMS）加速度传感器为核心的数字检波器具有灵敏度高、线性度好和动态范围宽等特点，成为地震检波器发展的主流。目前，国内还没有满足使用要求的传感器。为了满足石油勘探界提出的高分辨率、高保真、高精度勘探的需求，推动我国石油物探技术的快速发展。本项目提出一种基于双器件层SOI硅片的MEMS加速度传感器制作技术，研究该传感器单片制作工艺和弹性梁尺寸的精确可控方法；并应用该工艺制作出对称双面梁结构MEMS加速度传感器原理样机。所研制的新型微加速度传感器的制备方法简单，一致性高；形成的器件具有高度法向的对称性，抗侧向冲击和扭转冲击的能力强，灵敏度高和交叉灵敏度低等优点。项目的开展将突破石油勘探地震检波器用新型微机电传感器在设计、制造、封装、检测和应用等方面的关键技术，为其在新一代石油勘探装备中的应用打下深厚的技术基础。

中文关键词： 微机械；加速度传感器；检波器；单片硅片；地震勘探

英文摘要： Oil exploration using geophones follows 50 years of moving coil detector has been continuous improvement and development, technical performance has been greatly improved, but its narrow bandwidth, low dynamic range, low fidelity has never been able to overcome. Digital geophone with the new high-performance MEMS sensor compared with the traditional moving coil geophone has the advantages of wide bandwidth, large dynamic range, high vector fidelity, high resolution proposed to meet the oil exploration sector,high-fidelity, high-precision exploration of demand, so as to promote the rapid development of China's petroleum exploration technology. Currently, there is no domestic meet the requirements of the sensor. This project proposes a sandwich capacitive accelerometer production technique based on the dual-device layer SOI wafers, research the sandwich structure capacitive micromachined acceleration sensor fabricated process; developed a single SOI wafers made symmetrical double-sided beam structure MEMS acceleration sensor principle prototype. The project will be carried out in the design, manufacturing, packaging, testing, and application of key breakthrough in new MEMS sensor technology for the geophones in oil exploration and its application in a new generation of oil exploration equipment lay a profound tech

英文关键词： MEMS；Accelerometer；Geophone；single wafer；Seismic exploration