光刻物镜非球面镜超精面形检测技术基础研究

项目名称： 光刻物镜非球面镜超精面形检测技术基础研究

项目编号： No.51275398

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 李兵

作者单位： 西安交通大学

项目金额： 80万元

中文摘要： IC光刻领域对高精度非球面镜的需求激增，提出亚纳米级超精检测要求，国外相关检测设备均为自制，并不外售，国内缺乏检测手段。本项目提出基于小孔点衍射干涉测量结合环形子孔径拼接技术实现非球面面形超高精度检测的新方法，以光刻机投影物镜中所用非球面为主要检测对象，以实现超高精度检测为目标，主要研究基于小孔点衍射干涉测量的超高精度面形检测理论及关键技术；基于点衍射干涉测量系统的环形子孔径拼接检测大口径非球面理论及技术。 该方法通过微米尺寸小孔的衍射产生大范围、近似理想的球面波作为参考波面，组成超高精度干涉测量系统，摆脱了传统球面干涉仪标准镜头对其检测精度的限制，理论上可达到亚纳米级检测精度，利用环形子孔径拼接技术进一步扩展干涉测量系统的纵向测试范围，从而实现大口径、较大偏离非球面的超高精度检测，为一类非球面的超高精度检测开辟了新的途径，并为我国自主研制超高精度非球面检测设备奠定强有力的理论及技术基础。

中文关键词： 面形检测；非球面；点衍射；环形子孔径拼接；干涉测量

英文摘要： In some high-tech areas such as IC lithography, super-smooth aspheric mirrors are demanded in urgent, and a higher accurate measurement of aspheric mirrors, e.g.,hypo-nano rms, is necessary. Although, foreign countries have designed related measurement equipments for themselves, they are not for sale. In our country, we still lack of effective measuring method with such high accuracy. In this project, we put forward a new measuring method to solve this problem which based on point diffraction interferometer and annular sub-aperture stitching technique, and some basic research will be done. The main detection object is optical aspheric surface in lithography projection, and a hypo-nano rms accuracy is expected. The main research contents include two aspects: theory and key technology research on ultra precision measurement of optical surface based on the point diffraction interferometer; theory and key technology research on annular sub-aperture stitching about large aspheric surface based on point diffraction interferometer. Conventional interferometer, such as Fizeau or Twyman-Green interferometer, can only achieve nano accuracy with restricted by fabricating error of reference spherical lens. In our method, a nearly ideal spherical wavefront with spherical wavefront error less than λ/100000 rms, can be acqu

英文关键词： optical surface measurement；aspherical surface；point diffraction；annular sub-aperture stitching；interferometry