ZnO压电薄膜的制备及基于薄膜结构的声表面波传感器的研究

项目名称： ZnO压电薄膜的制备及基于薄膜结构的声表面波传感器的研究

项目编号： No.11304160

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 数理科学和化学

项目作者： 王艳

作者单位： 南京邮电大学

项目金额： 30万元

中文摘要： 本项目主要为压电（石英，铌酸锂，钽酸锂）或非压电基底(硅, 光学玻璃, 蓝宝石等)上ZnO压电薄膜的制备及基于薄膜结构的声表面波（SAW）传感器的研制和实时传感测试研究。利用磁控溅射技术、金属氧化物化学气相沉积技术等，优化非外延生长基底上高质量的，不同晶体取向的ZnO压电薄膜的制备方法和参数，结合半导体平面工艺设计新型结构IDT以及双路差分放大电路提高SAW传感器的稳定性。利用压电基底的高机电耦合系数改善SAW传感器的传感灵敏度；非压电基底实现SAW传感器与其他电子电路的兼容集成。同时，建立多层结构SAW传感器的计算模型，对SAW传感器的声学特性予以理论计算分析，得到最佳的ZnO压电薄膜的厚度，导波层材料及其厚度以及IDT电极的位置等结构参数。根据理论分析结果研制基于压电薄膜的SAW传感器并进行实时传感测试。

中文关键词： 声表面波；ZnO 压电薄膜；传感器；机电耦合系数；灵敏度

英文摘要： In this project, we present the deposition of ZnO piezoelectric films on piezoelectric substrates (quartz, LiNbO3, LiTaO3) or non-piezoelectric substrates (Si, SiO2, sapphire), by which the fabrication and the real-time sensing measurement of the surface acoustic wave(SAW) sensors based on the films are carried out. The piezoelectric ZnO films with good crystalline qualities are deposited by magnetron sputtering and/or metal oxidation chemical vapor deposition (MOCVD). The deposition methods and parameters of the ZnO piezoelectric films with different orientations on the nonepitixial substrates are optimized. In order to improve the stability of the SAW sensors, IDT with new structures and dual differential amplification circuit are designed and fabricated. The sensitivity of the sensors can be improved by the piezoelectric substrates due to the high electromechanical coupling coefficients. The non-piezoelectric substrates are favour for the compatibility and integration of the SAW sensors with other integrated circuits. Meanwhile, the acoustic characteristics of the SAW sensors with multi-layered structures are theoretically analyzed to optimize the thicknesses of the ZnO piezoelectric films, the materials and thicknesses of the guiding layers, as well as the position of the IDT. The SAW sensors are fabricated

英文关键词： surface acoustic wave；ZnO piezoelectric films；sensor；electromechanical coupling coefficient；sensitivity