闭链结构冗余直驱运动平台的刚柔耦合特性分析与精密协同控制方法研究

项目名称： 闭链结构冗余直驱运动平台的刚柔耦合特性分析与精密协同控制方法研究

项目编号： No.51475412

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 机械、仪表工业

项目作者： 姚斌

作者单位： 浙江大学

项目金额： 85万元

中文摘要： 多轴冗余直接驱动运动平台具有高刚性、快响应、大功率的优点，是实现高承载大推力长跨距的高性能高端制造装备的重要功能元件，已在航空航天、高档数控机床、微电子制造等领域得到应用。然而，实际系统的机-电-磁耦合未知非线性、运动机构柔性模态等增加了其动静态分析和高动态高精度控制的难度，并存在驱动饱和、物理状态和刚柔耦合动力学限制，以及冗余驱动的高刚性闭链结构容易造成过度的轴间耦合内力，进而导致控制性能退化等问题。本项目将研制实现亚微米级定位精度和高动态响应的H型多轴直驱精密运动平台, 研究系统基于物理连接刚性和导向轴承柔性的刚柔耦合参数化建模方法及高频柔性动力学约束关系, 创建不确定直驱系统基于刚柔耦合特性和实际约束下获得系统性能最优的受限优化模型补偿自适应鲁棒控制新方法，设计兼顾轴间内力与运动性能协调优化的冗余协同控制器，实现冗余直驱系统的高速高精度定位和轨迹跟踪、高精度同步运动和强抗干扰性能。

中文关键词： 直接驱动；冗余驱动；自适应鲁棒控制；协同控制；刚柔耦合

英文摘要： Multi-axis direct-drive motion stages with redundant actuations have the potential to provide high system rigidity, fast responses, and large thrusts. As such, they have become the key components for high-end manufacturing equipment and have been widely used in applications such as aerospace, high-performance CNC machine tools, microelectronics manufacturing, especially when large load-carrying capacity and large span structure are needed. However, unknown electro-mechanic-magnetic coupling nonlinearities and flexible modes of motion mechanism make the static/dynamic characteristic analysis and the high-bandwidth/high precision control of these devices rather difficult. Moreover, high rigidity of the closed-chain mechanisms of the direct drive systems with redundant actuations could easily lead to excessive coupled internal forces among axes and control performance deterioration. Other problems such as input saturation, physical limits and coupled dynamics also need to be addressed. This project is to develop H-type precision multi-axis direct-drive motion stages with sub-micron positioning accuracy and high closed-loop bandwidth. Specifically, the project proposes to (i) study the parametric modeling of rigid-flexible coupled dynamics based on the rigid connecting mechanism and the flexible linear bearing guides, (ii) develop the constrained optimization based model compensation adaptive robust control theory that can take into account the rigid-flexible coupling behaviors and nonlinearities, uncertainties, and disturbances of the direct-drive systems, (iii) synthesize innovative synchronization controllers that achieve optimal motion coordination of axes while avoiding excessive internal forces. It is expected that the results of this project will help direct-drive transmission systems with redundant actuations realize their potential of high-speed/high-precision positioning and trajectory tracking, and high closed-loop bandwidth with strong disturbance rejection capability.

英文关键词： direct-drive;redundant actuations;adaptive robust control;synchronization control;rigid-flexible coupling