超宽量程CMOS MEMS气压传感器基础研究

项目名称： 超宽量程CMOS MEMS气压传感器基础研究

项目编号： No.61474023

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 聂萌

作者单位： 东南大学

项目金额： 76万元

中文摘要： 气象监测具有重要的社会意义和经济意义，随着物联网产业的发展以及在气象监测领域的应用，气压传感器成为气象行业发展的重要瓶颈之一。在所有的气象探测活动中，空基观测极为重要，相应的测试仪器（探空仪）对高性能气压传感器提出了特殊要求，传感器必须满足恶劣环境下宽量程测量等要求。采用MEMS 技术，本项目首次提出可与CMOS标准工艺兼容的宽量程压阻型气压传感器结构方案，其主要创新点包括：（1）超宽测量量程(50-1080hPa)；（2）超低温工作(-90℃)；（3）适用于低温环境的封装设计。本项目的核心研究内容是建立一套完整的探空气压传感器设计方法：包括：（1）传感器敏感薄膜与结构设计；（2）传感器工艺设计；（3）传感器封装设计；（4）传感器测试设计。通过研究，研制出原理样机，为探空气压传感器设计和未来应用奠定基础。

中文关键词： 气压传感器；探空；CMOS兼容；超宽量程；微机电系统

英文摘要： Weather monitoring significantly benefits the economy of the society. With the development of IOT (Internet of things), the barometric sensor becomes one of the bottle necks of weather monitoring equipments. Radiosonde is one of the most important equipments in weather measuring application so that high-performance sensors are necessary. As to the barometric sensor, the measurement range and the ability of working in the harsh environment should be improved. By means of MEMS technology, we propose a CMOS compatible barometric sensor structure which can work in a ultra large measurement range at low temperature. The main innovations of this structure include: (1) ultra large measurement range (50-1080hPa),(2) low temperature working ability (-90℃) (3) the suitable design of packaging. The main content of our research is the design method and theory of the radiosonde barometric sensor, including: (1) the design of the structure, (2) the design of the fabrication process, (3) the design of the packaging and (4) the design of the measurement tests. During the research work, samples of the barometric sensor will be fabricated. It should promote the development of the radiosonde barometric sensors in the future.

英文关键词： barometric sensor;radiosonde;CMOS compatible;ultra large measurement range;MEMS