提高MEMS扫描红外激光外差干涉仪测量精度的关键问题研究

项目名称： 提高MEMS扫描红外激光外差干涉仪测量精度的关键问题研究

项目编号： No.61575054

项目类型： 面上项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 王春晖

作者单位： 哈尔滨工业大学

项目金额： 16万元

中文摘要： 光学均匀性是衡量光学材料质量高低的一项重要指标。随着国家重大光学工程项目的开展,需求日益迫切。对于能透射632.8nm光波的光学玻璃材料,Zygo激光干涉仪是不错的选择。但对于那些不能透射632.8nm光波的红外材料,目前还没有相应的测量手段。2010年哈工大提出了MEMS扫描红外激光外差干涉仪方案。该方案采用红外光纤激光器作为相干光源,经声光移频器产生百赫兹的载波信号,比较未透过样品的参考信号和透过样品的测量信号的相位差，获得光学厚度信息；为了实现大口径测量任务，MEMS反镜置于扫描透镜前焦点处,可产生几十万条垂直于样品的光束,合理设计工作距离，可对大口径样品进行测量。前期工作发现:光学元件相位非线性畸变、MEMS扫描光学系统线性度、参考信号光的“泄漏”、相位提取算法、二次数据处理等是制约测量精度的关键问题,通过本项目研究加以解决,利用光纤替代部分自由空间光路,降低对测试环境的要求。

中文关键词： 激光外差干涉仪；外差探测；微机电系统；平衡式探测器；相位非线性

英文摘要： The optical homogeneity is an important indicator to Measure the quality level of optical materials.Along with the national major optical engineering project, the launch of the demand is imperative.For the transmission of the waves of light to 632.8 nm optical glass material, Zygo laser interferometer is good choice.But for those who can't transmission 632.8 nm infrared materials of the waves of light, and there is no corresponding measuring method.In 2010, HIT put forward a scheme of MEMS scanning infrared laser heterodyne interferometer. The scheme adopts the infrared optical fiber laser as a coherent light source, the acousto-optic frequency shift to produce a 100 Hz carrier signal, by Comparing the Phase difference of the reference signal not transmitted through the sample and the measured signal through the sample phase to get the optical thickness information.In order to achieve large-diameter measurement task, the MEMS placed at the anterior focal point of the scan lens can produce hundreds of thousands of beam that is perpendicular to the samples, the rational design of the working distance, Can be achieved to the large diameter sample of measurement .In previous work we found that phase nonlinear distortion of the Division optical element , linearity of the MEMS scanning optical system ,leakage of th

英文关键词： Laser heterodyne interferomenter；Heterodyne detection；MEMS；Balanced detector；Phase nonlinerity