项目名称: 基于二维伺服控制的扫描探针三维测量方法研究
项目编号: No.61304251
项目类型: 青年科学基金项目
立项/批准年度: 2014
项目学科: 自动化技术、计算机技术
项目作者: 于鹏
作者单位: 中国科学院沈阳自动化研究所
项目金额: 24万元
中文摘要: 微纳米制造技术的飞速发展,有力促进了IC、MEMS、NEMS、超精密加工等重要前沿技术领域的发展,但微纳米尺度的高分辨率三维形态测量仍然是一个亟待解决的难题。本项目以微纳米尺度结构的三维形态测量需求为背景,开展基于二维伺服控制的扫描探针三维测量方法研究。本项申请以扫描探针成像机理为基础,研究基于相位差原理的探针双向驱动与激励方法,二维力反馈伺服控制方法,二维扫描信号的高分辨率提取方法,基于法向探测的扫描姿态控制与路径规划方法,纳米尺度三维形貌表征及重建方法,在实验平台上实现纳米尺度形态(沟槽尺寸、侧壁状态)的三维测量与表征,为微纳米制造技术的发展提供有意义的测量技术。
中文关键词: 扫描探针;三维测量;纳米结构;关键尺寸;
英文摘要: The rapid development of micro/nano manufacturing technology has contributed a lot for the developments of some advanced technologies, such as IC, NEMS, NEMS and Ultra-Precision Manufacturing. But now, the 3D nano metrology is still a difficult problem. This project studies the 3D nano metrology based on the 2D servo control of the scanning probe for the demand of 3D metrology of nano structures. This project studies the bi-directional driving and excitation method based on the phase difference theory, the 2D force feedback servo control method, the high-precision identification method of 2D scanning signals, the scanning attitude motion control and path planning methods based on normal vector probing, the method of 3D surface topography characterization and image reconstruction. This metrology method will be verified in an independently developed scanning probe microscope through the experiments of 3D metrology and characterization for nano trench structures. The research findings will provide a meaningful metrology method for the micro and nano manufacturing technology.
英文关键词: Scanning Probe;Three Dimension Metrology;Nano Structure;Critical Dimension;