精密测量物理关键单元技术攻关研究

项目名称： 精密测量物理关键单元技术攻关研究

项目编号： No.91536111

项目类型： 重大研究计划

立项/批准年度： 2016

项目学科： 数理科学和化学

项目作者： 王占山

作者单位： 同济大学

项目金额： 100万元

中文摘要： 超高精度激光系统是精密测量领域的重要组成部分，是解决国家基础科学、应用和国防领域精密测量重大需求的基础。超低损耗、低热噪声激光薄膜是激光测量系统的核心元件，如何从光学损耗、布朗噪声和热光噪声三方面控制激光薄膜性能是当前精密测量和薄膜光学领域的热点和难点。当前我国在这方面研究极少，国际上虽然提出了元素掺杂薄膜制备的新思路，但研究的系统性和深度还不够，阻碍了激光测量系统性能的进一步提高。因此研究超低损耗、低热噪声激光薄膜的基础理论和关键技术具有重要的科学意义和应用价值。本项目以控制薄膜光学损耗、热噪声为研究目标，以元素掺杂薄膜制备技术为基础，深入挖掘元素掺杂影响薄膜布朗噪声的物理机制，探寻元素掺杂薄膜的光学损耗及热光噪声的控制技术，进而优化完善薄膜设计、离子束溅射、后处理、薄膜特性检测等关键技术，推动我国超低损耗、低热噪声激光薄膜的发展，为精密测量领域的发展提供关键技术支撑。

中文关键词： 超低损耗激光薄膜；热噪声；光学损耗；制备技术；精密测量

英文摘要： Laser-based precise measuring system is one of the most important part in the high-precision metrology field. It is the basic and cutting edge measurement technologies for basic science, applications and national defense. Ultra-low loss, low-thermal noise laser coatings are the key components for laser-based precision measurement and are the most critical elements that affect the measurement accuracy. The current research hotspot of ultra-low loss, low thermal noise laser coatings is how to control the optical loss, brownian noise and thermo-optic noise simultaneously. China has rare study achievements in this field, and there is some research reports in this area world-wide, but it is still not deep and thorough, this hampers the further development of the sensitivity of the ultra-precision laser measuring system. Therefore, systematically investigating the basic theories and key technologies of ultra-low loss, low thermal noise laser coatings is crucial for fundamental science and applications. This project will aim at controlling the coating loss and thermal noise simultaneously,take the doped coating manufacture technology as the basic technology, and then deeply probe into the underlying physical mechanism of the relationship between the brownian noise and the atomic structure of the materials, explore the control technique of the optical loss and thermo-optic noise of the doped coatings. With the help of detail study of noise mechanisms, the key technologies such as coating design, ion beam sputtering deposition, postprocessing and characterizing will be improved.This project will promote the development of the ultra-low loss, low thermal noise coatings, and provide key technology support fo the new, advanced and cutting edge ultra-precise laser measuring techniques.

英文关键词： ultra-low loss laser coating;thermal noise;optical loss;fabrication technologies;high-precision metrology