基于多环耦合的半导体晶圆制造整体式自动物料搬运系统调度与性能分析

项目名称： 基于多环耦合的半导体晶圆制造整体式自动物料搬运系统调度与性能分析

项目编号： No.61273035

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 自动化技术、计算机技术

项目作者： 周炳海

作者单位： 同济大学

项目金额： 72万元

中文摘要： 本项目旨在研究并解决一类先进半导体晶圆制造的整体式自动物料搬运系统（AMHS）调度与性能分析问题。针对具有多环耦合的整体式AMHS系统的复杂性、不确定性等特点，在分析OHT小车的阻塞和冲突现象、Intrabay、Interbay多环耦合现象以及搬运路径约束条件的基础上，建立调度与性能分析问题域。在拓展和完善析取图的基础上，研究具有冲突现象的多资源OHT小车调度问题的边界条件、约束条件及搜索空间的描述方法。分析约束集，建立基于时间约束事件图的调度冲突求解策略及多目标调度数学规划模型。研究基于约束规划与过滤定向搜索技术的启发式算法。通过开发原型仿真系统，进行调度性能评价，最终对本项目提出的理论及方法进行验证。因此，通过本项目的研究可拓展调度、建模理论，丰富复杂系统调度算法设计方法，并对提高半导体晶圆制造的整体式AMHS系统的整体效率以及生产管理水平有重要的理论意义和实际应用价值。

中文关键词： 半导体晶圆制造；自动物料搬运系统；调度；建模；性能分析

英文摘要： This project aims to study and solve scheduling and performance analysis problems of an integrated automated material handling system (AMHS) for a class of advanced semiconductor wafer fabrications. For multi-loop coupled integrated AMHS complexity, uncertainty, etc., the problem domain of scheduling and performance analysis is built on basis of analysis for the OHT vehicle congestion and conflict phenomena, intra-bay, inter- bay multi-loop coupling phenomena, and the path constraints. Scheduling problem boundary conditions, constraints, OHT multi-resource conflicts, and the search space descriptive method are explored based on expanding and improving the disjunctive graphs. The scheduling strategy, multi-objective mathematical programming model are researched based on analysis set of constraints and timing constraint event graphs. A heuristic algorithm is explored on basis of the constrain programming and filter beam search method. Scheduling performance evaluation is implemented on basis of the development of a prototype simulation system. Finally, the proposed theories and approaches are verified. Therefore, through this research project, the scheduling and modeling theories can be expanded; and design method of scheduling algorithm for complex systems can be enriched. The research results of this project hav

英文关键词： Semiconductor wafer fabricaction；automated material handling system；scheduling；modeling；performance analysis