晶圆制造Interbay物料运输系统的动态调度研究

项目名称： 晶圆制造Interbay物料运输系统的动态调度研究

项目编号： No.51275307

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 张洁

作者单位： 上海交通大学

项目金额： 80万元

中文摘要： 晶圆制造Interbay物料运输系统（简称Interbay系统）具有大规模、复杂性等特性，本项目研究Interbay系统的动态调度方法，建立非等效并行机调度多目标模型和多约束模型；对晶圆卡的特性进行分析，提出基于时间函数的晶圆卡多维状态模型；研究Interbay调度问题的蚁群并行搜索算法，提出蚁群并行搜索路径的信息素描述方法，提出蚁群并行搜索空间模型以及网络空间压缩方法；提出了基于遗传规划的复合启发式调度规则的构造方法，利用生成的规则实现Interbay系统的调度；研究硬件在环仿真的数据通讯处理协议与信息实时同步机制，建立Interbay系统硬件在环仿真平台。开发晶圆制造Interbay系统动态调度原型系统，对所提出的理论及方法进行实验验证。本项目研究，对提高晶圆制造物料运输系统的性能和晶圆制造系统的整体效益等具有重要的理论意义和实际应用价值。

中文关键词： 晶圆制造系统；自动物料运输系统；Interbay；动态调度；蚁群算法

英文摘要： The Interbay automated material handling system (Interbay system) in semiconductor wafer fabrication system (SWFS) has its own characteristics, such as large scale, complexity. This project investigates the dynamic scheduling methods of the Interbay system. The highlights of this project are as follows: 1) Construct a multi-object and multi-constraint model of unrelated parallel machine scheduling. 2) Analyse features of wafer lot and form a time-function based multi-dimension state model of wafer lot. 3) Propose a dynamic scheduling method based on an improved ant colony optimization (ACO) algorithm, including a novel description of pheromone on the parallel search trails of ants, a parallel search space model and the reduce method of parallel search net. 4) Design a genetic programming based compositional rule generator to generate compositional heuristics of scheduling rules, so as to implement Interbay system scheduling by these automatic generated rules. 5) Research on the protocol of data communication and the real-time synchronization mechanism of information to create a hard-in-the-loop platform. 6) Develope a dynamic scheduling prototype system for Interbay system to verify the above proposed approaches. The research contributions are to improve the performance of SWFS, such as reducing the cycle time o

英文关键词： Semiconductor Wafer Fabrication System；Automated Material Handling System；Interbay；Dynamic Scheduling；Ant Colony Optimization Algorithm