微纳制造中界面多尺度杂交设计方法与关键力学行为研究

项目名称： 微纳制造中界面多尺度杂交设计方法与关键力学行为研究

项目编号： No.50875115

项目类型： 面上项目

立项/批准年度： 2009

项目学科： 生物科学

项目作者： 杨平

作者单位： 江苏大学

项目金额： 36万元

中文摘要： 本项目以多尺度杂交机制特征为突破口，寻求一种高效可靠建模理论方法，对微纳系统中界面结构物理行为进行研究，揭示包括微纳尺度效应、界面效应、界面材料组织演化等微纳观物理现象发生机制，建立面向微纳制造中材料界面结构的分子动力学－有限元混合杂交多尺度模型；同时设计先进的实验手段，利用原子力显微镜、纳米划痕仪、超声波扫描显微镜以及自主设计的粘着力测量仪等测试装置，确定模型的关键参数，如界面势函数参数和界面应变，解决多尺度模型界面参数难以获得的问题；进一步研究不同材料界面在热循环、弯曲、拉伸及振动冲击作用下的微纳力学问题，探索材料界面破坏的物理机制；实现基于多尺度杂交特征的界面特性模拟和预测，探索各种超越硅材料应用于微器件制造的可行性；由此建立微纳制造中界面结构多尺度杂交设计方法，研究将进一步促使宏微纳制造向高效及低成本方向发展。

中文关键词： 微纳制造；界面结构；多尺度杂交设计；分子动力学－有限元杂交模型；物理实验

英文摘要： In this project, an efficient & reliable modeling method will be sought based on the multi-scale hybrid mechanism for investigation on physical behavior of interfaces in micro/nano system. It will reveal the physical phenomenon include scale-effect, interface-effect and evolvement-effect of interface material tissue etc. A multi-scale hybrid model based on molecular dynamics and finite element method will be developed for investigation of interface structure in micro/nano manufacturing. In the meantime, some advanced experimental test measures will be developed to confirm the key parameters such as interface potential function and interface strain in modeling. These experimental test measures will be integrated by using Atomic Force Microscope, Nano/Micro Scratch System, Scanning Acoustic Microscope and Adhesion Testing Device respectively. The difficult problem in multiscale modelling can be resolved by using these advanced experimental test measures. In progress, the micro/nano mechanics about dissimilar materials interfaces will be investigated under thermal cycle, bending, tension, vibration and impact. The destruct mechanism of interface structure will be explored. The simulation of interface structure will be developed based on multi-scale hybrid model. The feasibility about the post-Si materials for micro manufacturing will be explored. So a multi-scale hybrid design method will be developed for interface structure in micro/nano manufacturing. This research can make the macro/micro/nano manufacturing develop to an efficient & reliable situation.

英文关键词： micro/nano manufacturing；interface structure；multi-scale hybrid design；mechanical behavior；physical test