双波长二维光栅纳米级平面位移测量方法的研究

项目名称： 双波长二维光栅纳米级平面位移测量方法的研究

项目编号： No.51275523

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 颜树华

作者单位： 中国人民解放军国防科学技术大学

项目金额： 77万元

中文摘要： 纳米测量是先进制造业发展的关键技术，也是整个纳米科技领域的先导和基础。本项目提出了双波长二维光栅纳米级平面位移测量方法，利用二维光栅的两组正交衍射光实现两个方向的位移测量，以消除两套独立的一维测量装置安装时堆栈式结构带来的阿贝误差和两轴向之间的垂直度偏差；采用双波长激光，给干涉条纹随位移（或时间）的变化引入一个载波，使普通光栅测量的直流信号系统转变为交流信号系统，大大增强系统的抗干扰能力和稳定性。通过研究干涉场特征信号变化与平面内位移量的对应机理、x和y两方向的测量参数耦合机理及解耦算法、二维光栅衍射特性对测量精度的影响机理、测量误差分析及性能综合评估等关键科学问题，构造高精度、高集成度、抗干扰性强且具有较大量程（如40mm*40mm）的外差式光栅干涉平面位移测量系统。其研究成果将提高我国超精密加工中较低价位纳米级测量仪器的自主创新能力，对进一步推动先进制造技术的发展具有重要的现实意义。

中文关键词： 纳米测量；平面位移；二维光栅；双波长激光；误差分析与补偿

英文摘要： Nanometer measurement is the key technology of developing the advanced manufacturing, and is also the forerunner and foundation of the entire field of nanotechnology. In this project, a method of nanometer planar displacement measurement with a dual-wavelength laser and a two-dimensional grating is proposed. By utilizing two sets of orthogonal diffraction light generated by the two-dimensional grating, displacements in both directions are obtained. As a result, Abbe errors and vertical deviation between two axial caused by the stacked structure can be eliminated when two sets of independent one-dimensional measuring device are installed. By utilizing the dual-wavelength laser, a carrier wave is introduced into signals of the interference fringes which change with the displacement or time. Therefore, the DC signal system for the ordinary grating interferometer measurement can be transformed into the AC signal system, which can improve largely the anti-jamming capability and stability of the measurement system. Some key scientific problems, such as the corresponding relationship between the planar displacement and the change of characteristic signal in the interference field, the coupling mechanism and decoupling algorithm between the measured parameters in x and y directions, the impacting mechanism about the dif

英文关键词： nanometer measurement；planar displacement；two-dimentional grating；dual-wavelength laser；error analysis and compensation