微米至亚微米尺度动态力学性能检测技术及系统研究

项目名称： 微米至亚微米尺度动态力学性能检测技术及系统研究

项目编号： No.11472151

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 数理科学和化学

项目作者： 李喜德

作者单位： 清华大学

项目金额： 168万元

中文摘要： 微米至纳米尺度材料和结构的动态力学性能是目前MEMS/NEMS超灵敏传感与操纵、生物材料与细胞探测、微纳米加工与制造、微纳米润滑与摩擦等领域关注的重要议题，也是微纳米实验力学新的研究方向。课题首先在微米尺度，发展基于空间和时间分辨光学和图像技术的动态力学性能测量方法和系统，解决微小尺度对象在动态测量中所面对的高速运动、大景深、严苛环境参数控制等测量问题，然后研究微米尺度下时间序列分析、低相干频闪，以及干涉显微多普勒等动态微纳米实验力学检测技术和方法；其次，在超越光学衍射极限，即亚微米至数十纳米范围，研究基于扫描显微平台的图像轮廓和标记线展宽动态变形测量技术、像衬对比时变测量方法和光谱分析技术等。最后，基于研究的检测技术和系统，完成悬臂敏感的纳米材料动态力学性能检测，及近表面相互作用、微米石墨层超润滑性能检测，进而对环境参数、边界夹持、范德华等因素在动态测量中所引入的耦合效应与非线性进行研究

中文关键词： 材料动态力学性能；微纳米尺度；显微干涉测量；测量环境控制；多场耦合与非线性分析

英文摘要： Dynamic mechanical properties of materials and structures at micron to nano-scale is an important issue currently for such areas as MEMS/NEMS ultrasensitive sensing and manipulation, biomaterials and cell detection, micro and nano processing and manufacturing, micro-nano superlubrication and friction, and etc., and also a new research direction of micro and nano experimental Mechanics. The project will first focus on the research of the dynamic mechanical measurement methods and systems at micro-scale based on the spatial and temporal resolution optical and imaging technologies, solving problems of high-speed movement, deep depth of imaging field, and the harsh parameter control of the environment in dynamic measurements of small-scale objects, and developing new testing methods at micro-nano scale based on measurement techniques of time serials analysis, low-coherence stroboscopic interfeormetry, and micro-interference Doppler detection. Secondly, beyond the optical diffraction limit, namely in the range from sub-micron to tens of nanometers, the propose will study the sub-micro scale dynamic mechanical measurement methods based on the mechanisms of the image blurring and marked line extending, and the techniques of speckle contrast and spectrum analysis on the scanning microscopic platforms. Finally, the project will complete the dynamic mechanical properties with a cantilever sensitized at nanoscale, interaction analysis at near surface, as well as superlubricity performance in micro-scale graphite flakes with the proposed measurement technologies and systems. Then the project will deal with the research on the dynamic coupling effects and nonlinear behavior introduced by the environmental parameters, boundary gripping, and van der Waals or other factors in dynamic testing.

英文关键词： dynamic mechanical property of materials;micro-nano scale;micro interferometry;controlled measurement environment;multi-field coupling and nonlinear analysis