肖特基式石墨烯氢敏器件的构筑及其性能研究

项目名称： 肖特基式石墨烯氢敏器件的构筑及其性能研究

项目编号： No.61203212

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 自动化学科

项目作者： 谷翠萍

作者单位： 安徽师范大学

项目金额： 26万元

中文摘要： 氢气是一种理想的清洁能源，应用广泛，但易引起爆炸。长期以来，人们一直在寻找选择性好、灵敏度高、能耗低、稳定性好、制作工艺简单且易集成的氢气传感器。本研究在器件中引入不对称肖特基势垒，提出研制一种基于微米尺度石墨烯的肖特基式场效应管氢敏器件。项目利用超声-溶剂剥离法制备微米尺度石墨烯，用化学还原法将钯和铂纳米粒子分别修饰到石墨烯表面 ，充当感知氢气分子的敏感位点，采用聚甲基丙烯酸甲酯膜转移技术将贵金属修饰的石墨烯转移至微米间隙电极上，用银浆焊接石墨烯与金电极接触的一端，构筑出肖特基式石墨烯场效应管器件；研究肖特基式石墨烯场效应管器件的电学特性，考察不同栅压下传感器对氢气的敏感响应；研究修饰钯或铂纳米粒子的石墨烯与氢气分子作用后载流子浓度和肖特基势垒的变化规律，阐明钯和铂修饰石墨烯传感器对氢气的敏感机理，建立肖特基式石墨烯氢敏器件的测试方法，为室温下氢气的灵敏、快速检测提供技术基础。

中文关键词： 石墨烯；金属纳米颗粒；金属氧化物纳米颗粒；传感器；氢气

英文摘要： Hydrogen as a kind of ideal clean energy is widely applied. But it easily cause explosion. For a long time, people are looking for one kind of hydrogen sensor with good selectivity, high sensitivity, low energy consumption, good stability, simple manufacturing process and easy integration. In this study, we put forward to fabricate a schottky-type field-effect hydrogen device based on a micrometre graphene in which a nonsymmetrical Schottky contact at one end of device is deliberately introduced. Ultrasound-solvent lift-off method is used for stripping micrometre graphene. The palladium and platinum nanoparticles is modified on the graphene by solution chemical reduction method, which serve as sensitive sites for hydrogen molecule. The graphene modified with noble metal nanoparticles is transferred onto the micro-gap electrodes using plolymethyl methacrylate (PMMA) film transferring technology. The schottky-type field-effect device based on micrometre graphene is built after one contact of graphene and the gold electrode is welded using silver plaster. The electrical property of the schottky-type field-effect device based on graphene will be studied. The sensor response to hydrogen under different gate voltage will be investigated. The changes of carrier concentration on the graphene and Schottky barrier will b

英文关键词： Graphene；Metal nanoparticles；Metal oxide nanoparticles；Sensor；Hydrogen