亚十纳米相区嵌段共聚物/离子液体薄膜的热退火相分离研究

项目名称： 亚十纳米相区嵌段共聚物/离子液体薄膜的热退火相分离研究

项目编号： No.21504042

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 数理科学和化学

项目作者： 陈双俊

作者单位： 南京工业大学

项目金额： 21万元

中文摘要： 能通过热退火形成亚十纳米垂直相区的嵌段共聚物薄膜是目前引导组装领域的研究热点。聚苯乙烯/聚甲基丙烯酸甲酯（PS-b-PMMA）是迄今用于嵌段共聚物引导组装最为成功的品种，但其相互作用参数较低，因而通常认为临界相区尺寸无法突破十纳米以下。前期工作通过采用一种高沸点离子液体己基甲基咪唑六氟磷酸盐（HMHF）与PS-b-PMMA简单掺混，HMHF与PMMA嵌段微区相容，痕量离子液体通过热退火处理提高PS与PMMA的不相容性，使其能够相分离形成亚十纳米尺寸相区。本项目拟深入探索离子液体与PMMA链结合作用对不同热退火条件下薄膜相分离的影响机制，考虑长程电荷作用建立模型，归纳出有效相互作用参数的经验方程。使用旋转流变仪和小角X射线衍射仪研究嵌段共聚物/离子液体体系的有序无序转变规律，通过界面化学调控在优化的热退火条件下得到亚十纳米尺寸垂直相区的PS-b-PMMA嵌段共聚物薄膜。

中文关键词： 嵌段共聚物；离子液体；相分离；亚十纳米；热退火

英文摘要： Poly (styrene-b-methyl methacrylate) (PS-b-PMMA) block copolymer has shown excellent promise as templates for nanomanufacturing by integrated into existing manufacturing processes, but weak block incompatibility limits its utility for the next generation lithographic applications. For PS-b-PMMA, limit of the minimum feature size is about ~12 nm by thermally annealing at 200 °C.To find a block copolymer with domain size less than 10 nm under thermal annealing and capability of pattern transfer is the key factor and a big challenge for the area of directed self-assembly technology. In our previous work, a room temperature ionic liquid, i.e., hexyl methylimidazoliumhexafluorophosphate (HMHF) has been employed to increase block incompatibility of PS-b-PMMA under thermally annealing conditions. HMHF preferentially pervades the PMMA block domain in PS-b-PMMA because of their compatility. With the aid of HMHF, perpendicular orientation of PS-b-PMMA thin films is achieved on silicon substrates, which is grafted with hydroxyl terminated random copolymers of styrene and methyl methacrylate.The HMHF facilitates the enhancement of effective interaction parameter (χeff) between the PS and PMMA block, resulting in the formation of enlarged domain period and modified interphase. In this project,we will systematically study the role of the ionic liquid and the interaction between ionic liquid and PS-b-PMMA on the phase separation of block copolymer under thermal annealing. In order to simulate the χeff value, charge effect will be considered to construct new model of phase separation under different thermal annealing conditions. The small angle X-ray scattering and rheometer will be used to detect the order-disorder transition of PS-b-PMMA and ionic liquid system. Moreover, by carefully design the chemical composition of the substrate, thin film of PS-b-PMMA and ionic liquid system with perpendicular sub-10nm lamellar domain will be attained through thermal annealing.

英文关键词： block copolymer;ionic liquid;phase separation;sub-10 nanometer;thermal annealing