新型微偏振器件阵列的设计、制备与单片集成研究

项目名称： 新型微偏振器件阵列的设计、制备与单片集成研究

项目编号： No.61204063

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 信息四处

项目作者： 赵晓锦

作者单位： 深圳大学

项目金额： 24万元

中文摘要： 近年来，传统只依赖光强或颜色的CMOS/CCD成像系统在卫星遥感、海洋开发、生物医学等相当多领域的应用遇到了很大困难，而利用光偏振特性的成像系统在解决这些困难方面已经取得了非常好的效果。与已有其它偏振成像系统相比，以"微偏振器件阵列"和"CMOS图像传感器"为核心器件的CMOS单片偏振成像系统在成本、体积、速度和功耗等诸多方面都表现出了极大的优势。然而，关于微偏振器件阵列的设计制备研究尚处于初级阶段，很多诸如圆偏振分量无法提取、像素尺寸过大、光学性能参数过低等方面的问题有待解决。此外，微偏振器件阵列与CMOS图像传感器单片集成方面的研究尚属起步，相关建模、工艺实现、集成后续分析优化等方面的技术亟待开发。鉴于此，我们提出"新型微偏振器件阵列的设计、制备与单片集成研究"项目，希望在综合解决上述问题基础上实现真正意义上的CMOS偏振成像系统芯片，为上述应用领域遇到的困难提供经济有效的解决方案。

中文关键词： 偏振成像；微偏振器件阵列；CMOS图像传感器；单片集成；液晶光控取向

英文摘要： In the past few years, light-polarization-based imaging systems have shown great promise by solving many difficulties encountered by traditional intensity or color based CMOS/CCD imaging systems in a wide range of applications, including satellite remote sensing, ocean development, biomedical engineering, to name a few. Compared with all the other existing polarization imaging systems, CMOS monolithic polarization imaging systems, which consist of "micropolarizing device array" and "CMOS image sensor", exhibit great advantages in terms of manufacture cost, system volume, sensing speed and power consumption, .etc. However, research on the design/fabrication of micropolarizing device array is still on its early stage, there are quite a few problems to be solved, such as no extraction of circular polarized components, large pixel size, low optical performance, .etc. In addition, research on the monolithic integration of micropolarizing device array and CMOS image sensor just started, technical efforts on the related modelling, process implementation, post-process analysis and optimization are urgently expected. Therefore, we propose this project of "Research on the design, fabrication and monolithic integration of novel micropolarizing device array", hopefully we can realize the CMOS polarization imaging system on

英文关键词： Polarization imaging；Micro-polarizing device array；CMOS image sensor；Monolithic integration；Liquid crystal photoalignment