面向SOC新型紫外探测器特性研究及集成读出电路技术

项目名称： 面向SOC新型紫外探测器特性研究及集成读出电路技术

项目编号： No.61274043

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 无线电电子学、电信技术

项目作者： 金湘亮

作者单位： 湘潭大学

项目金额： 82万元

中文摘要： 目前紫外探测系统有灵敏度低、集成度低、体积庞大、功耗高等缺点，本课题从解决目前紫外探测器存在的缺点出发，基于CMOS工艺特点和已有的硅基探测器研究基础，研究提高光量子效率、降低噪声、提高弱光响应灵敏度的理论，揭示系统集成紫外探测器的可能性，为面向SOC单芯片集成紫外探测系统提供新思路，提出高性能超级紫外单光子雪崩光电探测器新结构。采用物理建模、计算模拟、结构设计、工艺设计、流片加工的研究方法，建立新器件各种光学、电学特性的解析和电路模型，通过器件制备、参数测试、反馈并改进模型，为片上集成读出电路的设计提供接口参数、仿真模型和实际器件。针对提出的新器件研究读出电路技术，提出一种具有对探测器暗电流和噪声有效抑制、注入效率和电荷灵敏度高、动态响应范围大、低噪声和高稳定的读出电路结构，为SOC集成紫外探测器提供信号处理电路新技术，并完成芯片试制和验证。本课题成果可应用于医疗、科学和国防等领域。

中文关键词： 紫外探测；CMOS工艺；传感器；读出电路；SOC

英文摘要： At present the UV detection system has some disadvantages, such as low sensitivity, low integration, bulky, power consumption, etc.. The subjects of this project are to find one's way out to resolve those current shortcomings. Based on the CMOS technology features and the research experience of silicon detectors, this project researches on the theories how to improve the quantum efficiency, how to reduce noise and how to improve low light sensitivity; and then reveals the possibility of the system integrating UV detector with the signal process circuit. The above researches provide the new ideas for the single chip integrated UV detection system adopting the system on a chip method. A novel high-performance super-ultraviolet single photon avalanche photodetector structures are proposed in this project, which is to be researched through the methods of the Physical modeling, the computer simulation, the structural design, process design, and tapeout verification. A variety of the analytical models and the equivalent circuit models are established for the proposed device. Adopting the device fabrication and the testing, the silicon parameters are feedbacked the built models to improve the simulation. The interface parameters and the simulation models of the proposed device are provided for the simulation of the on-

英文关键词： UltraViolet detector；Complementary Metal-Oxide-Semiconductor process；Sensor；Readout Circuit；System on a chip