超声原子力显微术的内部纳米结构成像机制和系统研究

项目名称： 超声原子力显微术的内部纳米结构成像机制和系统研究

项目编号： No.51275503

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 陈宇航

作者单位： 中国科学技术大学

项目金额： 82万元

中文摘要： 超声原子力显微术（UAFM）集成了超声检测的无损穿透能力和原子力显微镜的高空间分辨率的优点，可实现样品内部纳米结构的检测，在众多研究领域中具有广阔的应用前景。本项目针对目前基于UAFM原理的样品内部纳米结构成像机制还不清楚、测试数据只能定性表征等问题，提出开展基于探针/样品微弱高频超声振动信号分析的纳米尺度内部结构特性定量重构的深入研究。主要研究内容包括：搭建柔性工作环境、基于UAFM原理的内部纳米结构成像系统平台；深入分析探针/样品的超声振动耦合作用机制，明确高频振动的耦合输出与内部结构特性以及众多关键影响因素的内在关联；进行与其他三维纳米成像技术的比对分析及应用探索。本项目提出的多参数耦合优化分析方法和内部纳米结构特性定量重构具有新意。本项目的实施可为纳米尺度生物科学、材料科学和纳米制造的研究提供新的测试方法，为后续的应用奠定坚实的理论和技术基础。

中文关键词： 超声原子力显微术；次表面纳米成像；缺陷检测；接触共振原子力显微术；

英文摘要： Ultrasonic atomic force microscopy (UAFM) combines the nondestructive feature of the ultrasonic detection and the high spatial resolution of atomic force microscopy. UAFM method has been demonstrated to be able to detect embedded nanostructures and thus it has a great potential for applications in various fields of nanoscience and nanotechnology. However, the subsurface imaging mechanisms of UAFM have not been clearly understood. The quantitative evaluations of the measured results have been rarely addressed. Considering all these practical situations, we propose the investigations of quantitative subsurface structure reconstruction based on the detected weak ultrasonic interactions between the probe and the sample. The major investigation issues are summarized as follows. A UAFM based subsurface nanoimaging system with flexible operation environment will be constructed. The investigations on the coupling interactions of the probe/sample ultrasonic oscillations will be carried out. The relations between the detected ultrasonic signal and the physical properties of subsurface structures will be explored quantitatively. The imaging method will be also compared with other three-dimensional nanomeasurement techniques. The proposed optimizations of the key influencing factors in a multiparameteric space and the quant

英文关键词： Ultrasonic atomic force microscopy；Subsurface nano-imaging；Defect detection；Contact resonance atomic force microscopy；