纳米结构金刚石基板上单晶二氧化钛薄膜的低温制备与特性研究

项目名称： 纳米结构金刚石基板上单晶二氧化钛薄膜的低温制备与特性研究

项目编号： No.51272224

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 一般工业技术

项目作者： 顾广瑞

作者单位： 延边大学

项目金额： 80万元

中文摘要： 本项目开展纳米结构金刚石衬底上单晶TiO2薄膜的低温沉积研究，对探索低温、不依赖基板材料制备高质量薄膜的新技术是十分必要的。利用微波等离子体化学气相沉积（MWPCVD）方法，制备高品质的金刚石薄膜；利用磁控溅射和MWPCVD技术，基于自组织化原理，对金刚石薄膜进行后处理和追加生长，制作纳米结构（针状、柱状）的金刚石衬底；利用磁控溅射技术在纳米结构金刚石衬底上制备高度择优取向或单晶TiO2薄膜。研究各实验参数对二氧化钛薄膜结构相变、结晶取向的影响；研究diamond\TiO2复合系统的光学性质和电学性质；理论上探究纳米结构金刚石衬底上单晶二氧化钛薄膜的生长机理和Diamond\TiO2复合系统的电子输运特性。最终优化实验条件，制备出电学、光学性质俱佳的Diamond\TiO2复合材料。

中文关键词： 金刚石薄膜；纳米结构；二氧化钛薄膜；单晶；磁控溅射

英文摘要： An investigation on low temperature fabrication of single crystal titanium dioxide thin films on nano-structured diamond substrates will be done in this project. It is very necessary to search after a new technology of depositing high quality film materials at the low temperature and without depending substrate materials. High-quality diamond films will be prepared by using microwave plasma chemical vapor deposition (MWPCVD) methods. Based the self-assembled theory, post-treatment and additional growth for diamond films will be carried out by magnetron sputtering and MWPCVD, and nano-structured diamond substrates will be fabricated. High preferred orientation or single crystal TiO2 films will be prepared on the nano-structured diamond substrate by magnetron sputtering. Influences of the various experimental parameters on the film structure phase transition and crystalline orientation will be researched, and the study of the electrics and optics properties of diamond\TiO2 composite system will be done. The growth mechanism of single crystal titanium dioxide thin films deposited on nano-structured diamond substrates and the electron transfer properties of diamond\TiO2 composite system will be theoretically explored. At last, diamond\TiO2 composite system with excellent electrics and optics properties will be obtai

英文关键词： diamond films；nanostructure；TiO2 thin films；single crystal；magnetron sputtring