薄膜压痕脱层问题的理论和实验研究

项目名称： 薄膜压痕脱层问题的理论和实验研究

项目编号： No.10872184

项目类型： 面上项目

立项/批准年度： 2009

项目学科： 金属学与金属工艺

项目作者： 赵明皞

作者单位： 郑州大学

项目金额： 44万元

中文摘要： 本项目建立了二维压痕脱层实验中薄膜脱层屈曲的非局部力学模型和三维压痕脱层实验圆形脱层薄膜的屈曲模型，给出了表征基体变形和压痕缺口的广义线弹簧模型的本构关系，系统研究了基体变形、压痕缺口、材料的内禀尺度等因素对压痕脱层薄膜屈曲行为的影响，给出了界面裂纹的应力强度因子和能量释放率的表达式；本项目提出了加载压痕应力和卸载压痕应力这两种压痕应力，研究给出了考虑材料的弹塑性行为、残余应力、多层薄膜情形下，薄膜压痕脱层实验中的压痕应力公式，该公式包含了每层薄膜的弹性模量、泊送比、屈服应力、强化系数、残余应力的影响，阐明了残余应力在压痕应力中的关系。为薄膜/基体系统的残余应力、界面断裂韧性等力学性能测试的压痕脱层实验方法提供了正确的理论基础。 本项目研究了非局部动态悬臂梁模型，考虑材料的内禀尺度和基体变形的影响，得到系统的固有频率方程；建立了薄膜/基体系统力学性能测试的平头圆柱形压头和球面压头鼓泡实验模型，完善、拓宽和延伸了鼓泡实验方法；提出压电介质的抛物线单元，并建立含抛物单元的广义不连续位移边界方程方法。本项目对相关行业的发展具有重要的应用价值。

中文关键词： 薄膜；压痕脱层实验；基体变形；非局部理论；界面断裂韧性；

英文摘要： Two-dimensional nonlocal mechanics model and three-dimensional penny-shaped mechanics model have been developed for the buckling analysis of delaminated thin films induced respectively by microwedge indenter and conical indenter in the indentation induced delamination tests. The coupled line spring models have been proposed to model the substrate deformation and the effect of the indented notch, and the constitutive equations have been given. The influences of the substrate deformation, the indented notch, the intrinsic length of the tested material on the buckling behaviors have been studied systematically. The stress intensity factors and the energy release rate have been obtained. The loading indentation stress and the unloading indentation stress have been defined and the indentation stress formulae have been derived with the elastic-plastic properties and the residual stresses in the indented multilayer thin films taken into account. The study of the project has established a theoretical system for the indentation induced delamination test. Taking into consideration the effects of substrate deformation and material intrinsic length, a cantilever beam model has been developed and the frequency equation has been derived. The models of blister tests by flat-ended shaft of circular cross-section and spherically capped shaft have been proposed.

英文关键词： thin film; indentation induced delamination test; substrate deformation; nonlocal theory; interface fracture toughness