磁性先驱体聚合物的合成与图案化及其应用于制备磁性陶瓷MEMS

项目名称： 磁性先驱体聚合物的合成与图案化及其应用于制备磁性陶瓷MEMS

项目编号： No.50802114

项目类型： 青年科学基金项目

立项/批准年度： 2009

项目学科： 金属学与金属工艺

项目作者： 邢欣

作者单位： 中国人民解放军国防科学技术大学

项目金额： 19万元

中文摘要： 当前，随着MEMS的应用向耐高温、耐磨损、抗腐蚀方向的发展，制造MEMS的传统材料硅、玻璃、聚合物和金属受到了很大的限制，这样就使得在耐高温、耐磨损、抗腐蚀的陶瓷材料成为MEMS在苛刻环境中应用的首选材料。SiC陶瓷是一种优良的半导体材料，又具有优异的力学性能，可以用作MEMS的基体材料。磁性MEMS在科学研究及应用领域中有着巨大的潜力。本项目旨在通过先驱体转化法制备磁性材料，并应用于制备磁性陶瓷MEMS. 本项目由聚甲基硅烷出发，在合成分子量可调的磁性高分子化合物的基础上，研究其成型性能和高温裂解性能，实现磁性碳化硅陶瓷材料的制备；利用先驱体转化法和软刻蚀技术，在对先驱体聚合物进行成型和图案化的基础上，通过高温裂解无机化，实现陶瓷MEMS的制备；获得磁性能可调的高分子材料和陶瓷材料。 通过该项目研究，初步认识了金属元素配位与有机硅聚合物分子结构的关系，掌握了先驱体聚合物交联度与陶瓷性能变化机制的基本规律，为陶瓷MEMS的发展提供技术支持。已获得2项已授权的国家发明专利，已发表论文11篇，已录用的论文1篇，其中，SCI收录4篇。

中文关键词： 先驱体聚合物;聚甲基硅烷;陶瓷MEMS;软刻蚀

英文摘要： Traditional materials for manufacturing MEMS silicon, glass, polymers and metals have been a lot of restrictions with the application of MEMS high temperature resistance, wear resistance, corrosion resistance development currently. Which makes it resistant to high temperature, wear resistance and corrosion resistance of ceramic materials become the preferred materials for MEMS applications in demanding environments. SiC ceramic is an excellent semiconductor material, and has excellent mechanical properties, can be used as a substrate for MEMS materials. Magnetic MEMS has great potential in the field of scientific research and its application. This project through the preparation of magnetic materials by preceramic method and applied to the preparation of magnetic ceramic MEMS. The magenetic ceramic MEMS are prepared by precermic method and soft lithorgraphy.Firstly, the magnetic polymer are synthesized by the mother polymer polymethylsilane. Sencondly, the pattern design are processed after the research of the forming performance of the polymer. Thirdly, the magetic ceramic materials and MEMS are obtained after the preceramic polymer pyrolysized at high temperatur. The project also proved the relationship of metal coordination and silicone polymer structure, mastered the basic principles of the crosslinking polymer and pyrolysis properties. These variation can provide technical support for the development of the ceramic MEMS. The group members have applied 2 CN patents and published 11 papers, among which 5 papers were indexed by SCI. 1 additional paper has been accepted.

英文关键词： preceramic polymer; polymethylsilane; ceramic MEMS; soft lithorgraphy technology