光学抛光加工中的中高频面形误差形成机理研究

项目名称： 光学抛光加工中的中高频面形误差形成机理研究

项目编号： No.60808017

项目类型： 青年科学基金项目

立项/批准年度： 2009

项目学科： 轻工业、手工业

项目作者： 万勇建

作者单位： 中国科学院光电技术研究所

项目金额： 25万元

中文摘要： 代表当今先进光学制造技术水平的大型天文望远镜、高功率激光系统和纳米光刻等极端光学系统的研制对光学元件面形误差提出了更为严格的要求，光学元件中高频面形误差直接影响光学系统的对比度和能量损失程度，中高频误差的抑制是极端光学制造不可避免的难题。光学加工技术中主要可分类为磨盘磨削技术和束流轰击技术，课题基于这两种技术的材料去除机理分别从宏观和微观角度分析抛光过程中的中高频误差形成机理，研究表明中高频误差主要由去除函数误差、轨迹误差、机床定位误差、去除特性等因素因素引起，基于这些影响因素，课题推导了误差模型，并提出并实验研究中高频误差的抑制方法，基于误差抑制方法，形成一套稳定、高效地中高频误差抑制工艺路线。该工艺路线采用针对性的半刚性磨盘平滑光学表面的中高频误差，然后采用磁流变抛光技术修正中低频误差，最后采用束流轰击去除抛光技术一种中高频误差，这种工艺利用各种技术的特点，分阶段综合使用，直到把光学表面的中高频误差抑制到符合要求.

中文关键词： 光学加工；中高频误差；误差抑制；误差模型

英文摘要： The fabrication development of stringent optics systems, such as high-power laser system, large astronomical telescopes and nano-lithography systems, which are representative of today's advanced optical manufacturing technology level, make more stringent requirements for the extreme optical surface shape error. Considering that the middle and high-frequency surface shape error in optical components influences the contrast and the extent of energy losses of optical system, the inhibition of errors of the extreme optical manufacturing will be an inevitable problem.The fabrication technique can be classified as abrasion technique and energy beam removal technique.Based on the researches of abrasion mechanism by abrasive particle and energy beam removal, the mechanism of formative middle and high spatial-frequency errors by discrete abrasive particle and energy beam has been studied in this work. The results show that the middle and high-frequency errors are produced by unstable removal errors、polishing path errors、machine precision、unperfect removal function, and so on. Then, errors model function were deduced and elimination ways were studied and experimented based on errors factors. finally, errors elimination technics were established. The errors elimination technics adopt active semi-rigid tool which can be distorted to fit to the workpiece surface figure to control middle and high-frequency errors, and adopt energy beam polishing technique to eliminate middle and high-frequency errors if the surface is not up to the mustard. Abrasion technique and energy beam removal technique are used synthetically in this errors elimination technics.

英文关键词： Optics fabrication; Middle and high spatial-frequency errors; Errors control; Errors model