表面结构的多尺度融合测量方法研究

项目名称： 表面结构的多尺度融合测量方法研究

项目编号： No.51275159

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 陈育荣

作者单位： 湖北汽车工业学院

项目金额： 82万元

中文摘要： 随着现代科技的发展，产品的表面结构及其特性已成为能否成功实现产品设计功能的主导因素，因而其表面结构测量越来越重要。现有表面结构测量方法难以满足新形势下产品表面结构测量的多尺度要求，因此本项目拟研究产品表面结构的多尺度融合测量方法。该方法基于白光显微干涉图像的多尺度融合测量传感器，大行程、纳米级和计量型三维位移工作台，将垂直扫描白光干涉及其拼接测量、显微图像及其拼接测量、白光干涉纳米单探针及其多探针测量和白光干涉金刚石探针测量等多种不同尺度的测量方法融合，实现现代产品表面结构的多尺度融合测量。本项目的研究适用于微传感器、微机电系统（MEMS）、纳机电系统（NEMS）、光学器件和精密、超精密机械零件等多尺度结构表面和工程表面的测量。在精密及超精密加工、半导体光刻和纳米工程等领域中，具有广泛的应用前景。

中文关键词： 表面结构；多尺度；融合测量；纳米探针；

英文摘要： With the development of modern science and technology, surface texture and its characteristics are turning into the dominant factors whether the product can achieve the design feature successfully. So the measurement of surface texture are becoming more and more important.It is difficult by the existing measurement methods to satisfy the multiscale measurement need for the product in new situation. This project intends to study the multiscale intergration measurement method for product surface texture.Based on the multiscale integration measurement sensor of white light microscopy interference image, 3D precision displacement system with large travel, nanometer level and displacement measurement, some different sacle measurement methods, such as vertical scanning white light interferometry and its stitching measurement, microscopic image measurement and stitching measurement, single nanoprobe measurement by white light interferometry and diamond probe measurement by white light interferometry, can be integrated together to meet the need of multiscale measurement for modern proguct. The study of this project is appropriate for the measurement of surface texture such as micro-sensors, micro-electromechanical systems(MEMS), nano-electromechanical systems (NEMS),optical devices and precision, ultra-precision machin

英文关键词： Surface Texture；Multi-scale；Integration Measurement；Nanoprobe；