基于激光合成波长干涉原理的波长测量方法研究

项目名称： 基于激光合成波长干涉原理的波长测量方法研究

项目编号： No.51205365

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 机械工程学科

项目作者： 严利平

作者单位： 浙江理工大学

项目金额： 25万元

中文摘要： 激光波长是长度测试计量领域中的基准量值，激光波长的检测与校准是保证长度测量结果准确性的关键和基础。现有的干涉式波长测量方法主要是通过计算待测激光波长与参考激光波长的干涉条纹数之比来实现，受条纹个数及条纹细分数的限制，测量精度已很难提高。本项目依据"待测激光波长和参考激光波长的干涉信号相位差变化2π与其合成波长之间的一一对应关系"，提出一种基于激光合成波长干涉原理的激光波长测量新方法，解决现有干涉法波长测量存在的条纹数受限技术问题，可实现激光波长的高精度测量与校准。本项目拟通过对该测量方法的理论分析、测量系统优化设计、光电信号处理方法研究、非线性误差分析和实验验证，构建基于激光合成波长干涉的激光波长测量原理，研制一套高精度的激光波长测试计量装置。通过本项目的研究，旨在解决测试计量技术领域中作为长度"尺子"的激光波长的精确测量与校准这一关键技术，拟实现波长测量不确定度优于0.001ppm。

中文关键词： 波长测量；合成波长干涉；相位差；检测；校准

英文摘要： The laser wavelength is the standard value in the length metrology, so the measurement and calibration of the laser wavelength is crucial to guarantee the accuracy of length measurements. For most present wavelength measurement methods based on laser interferometry, the wavelength measurement is realized by calculating the ratio of the interference fringe counts of a reference wavelength and an unknown wavelength. The wavelength measurement accuracy is limited by the total number of fringes and the subdivision factor of fringe. According to the one-to-one relation that the synthetic wavelength corresponds to 2π variation of the phase difference between the interference signals of the unknown and reference wavelengths, a new wavelength measurement method based on the principle of the laser synthetic wavelength interferometry is proposed. This new method will solve the limitation of fringe number existed in present wavelength measurement methods based on laser interferometry and realize high precision measurement and calibration of the laser wavelength. And after theoretical analysis of the measurement method, optimization design of the measurement system, study of the photoelectric signal processing method, analysis of the nonlinearity error and experiments testing, a wavelength measurement principle based on the

英文关键词： wavelength measurement；synthetic wavelength interferometry；phase difference；measurement；calibration