基于边缘滤波技术的硅基片上集成型波长解析器

项目名称： 基于边缘滤波技术的硅基片上集成型波长解析器

项目编号： No.61475137

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 杨建义

作者单位： 浙江大学

项目金额： 82万元

中文摘要： 集成型波长解析器件是片上光检测系统不可或缺的组成部分。基于边缘滤波器的波长解析技术是实现高性能集成型波长解析的重要方案之一。本项目基于硅基光子技术，结合硅基集成光波导结构的特性，提出利用高Q微环谐振腔和Fano谐振结构所具有的滤波特性来构建X形边缘谱形，设计具有高斜率的边缘滤波器；采用两级解析结构设计具有宽波长范围的解析系统，提出利用多环方案和眼形微环嵌套Fano热调谐方案完成精解析。基于硅基CMOS兼容工艺技术，集成光电探测器，设计并研制出基于边缘滤波器的集成型波长解析器。所研制的波长解析器分辨率达到亚皮米量级。这些工作将为片上集成光子分析系统的建立打下基础。

中文关键词： 集成光学；传感器；硅基光子学；波长解析；边缘滤波

英文摘要： The integrated wavelength interrogator is the indispensible component of on-chip optical analysis systems. The interrogator based on the edge filter is one of the most valuable schemes. After considering the characteristics of the optical waveguides and related functional structures on silicon, high-Q microring resonators and Fano-resonant structures will be employed to achieve X-shape edge spectrum, and then the edge filter with a large slope will be designed. The scheme with two-level interrogating configuration will be adopted to realize the system with a large wavelength interrogating range. In this scheme, arrayed microrings are used to complete the fine interrogation around the whole range. The thermal tuning scheme based on the eye-like microring fano resonant structure can be also expected to do the fine interrogation. Based on CMOS compatible fabrication technology, the edge filter based wavelength interrogator will be fabricated, in which the photodetectors will also be integrated. The fabricated interrogator is expected to have the resolution smaller than 1 pm. This work will be the foundation to develop on-chip integrated optical analysis systems.

英文关键词： Integrated Optics;Sensor;Silicon Photonics;Wavelength Interrogator;Edge Filter