基于多片计算全息图的凹非球面绝对检测技术研究

项目名称： 基于多片计算全息图的凹非球面绝对检测技术研究

项目编号： No.61505157

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 李世杰

作者单位： 西安工业大学

项目金额： 21万元

中文摘要： 绝对检测技术是获得光学元件真实面形的最直接、有效的手段。在平面和球面都已实现绝对检测的情况下，如何对非球面进行绝对检测显得尤为重要。计算全息图（CGH）检测非球面技术已经得到广泛应用，但CGH误差却无法得到准确地标定。针对非球面的绝对检测问题，以凹非球面为研究对象，选择CGH作为补偿元件，在球面标准镜头的焦前和焦后分别设计两片CGH，它们单独作用时分别能对被测非球面进行检测，共同作用时能对参考球面镜进行检测；再结合球面绝对检测技术，对CGH检测该被测非球面的实际误差进行绝对标定，从而实现非球面的绝对检测。项目预期将提出一种CGH误差的绝对标定方法，开辟一种新的凹非球面绝对检测技术，为纳米甚至亚纳米量级的非球面面形检测提供一种有效的检测手段。项目的研究成果将为高精密非球面光学元件的加工和检测提供技术保障，对深紫外和极紫外投影曝光系统的研制具有重要意义，具有显著的工程应用价值。

中文关键词： 光学检测；非球面；绝对检测；计算全息图；CGH误差

英文摘要： Absolute detection technology is the most direct and effective method to get the real surface shape of optical element. Nowadays, both flat and sphere can be measured absolutely, then it is very important that how to realize absolute test for aspheric surface. Computer Generated Hologram (CGH) is a good choice, but until now the error of CGH cannot be calibrated accurately. This research aims at concave aspheric surface, and we also choose CGH as compensation. Two CGHs will be designed, one is before the focus of transmission sphere (TS), and the other is after it. When the two CGHs work separately, both can measure the aspheric surface under test; on the other hand, when the two CGHs work together, the reference sphere can be detected by them. And then, combined with absolute test technology for sphere surface, the practical error of CGH for aspheric surface can be calibrated accurately, so that the aspheric surface is tested absolutely. Our research will propose an absolute calibration method for CGH error, and open up a new absolute measurement technology for concave aspheric surface. The results of the project will be demonstrated to provide an effective method to test concave aspheric surface absolutely and afford technical support for development of high-precision aspheric optical components. Meanwhile it has significant practical engineering significance.

英文关键词： Optical measurement; Aspheric surface; Absolute test; Computer Generated Hologram;CGH error