MgZnO/MgO多量子阱的生长、物性调控及其场效应晶体管性能研究

项目名称： MgZnO/MgO多量子阱的生长、物性调控及其场效应晶体管性能研究

项目编号： No.61306103

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 无线电电子学、电信技术

项目作者： 王雷

作者单位： 南京工业大学

项目金额： 25万元

中文摘要： 新一代平板显示器的发展迫切需要高迁移率场效应晶体管(FET)为驱动器件。本项目以岩盐矿MgZnO/MgO多量子阱（MQWs）及其FET为研究对象，针对岩盐矿MgZnO的生长机制和MQW载流子浓度的控制两个关键科学问题进行研究。主要研究内容包括：①采用电子束蒸发技术生长高质量岩盐矿MgZnO/MgO MQWs。②利用结构优化和掺杂，实现对MQW光学带隙、电子结构与电学性能的调控。③构建MgZnO/MgO MQWs-FET，检测FET的输出特性、阈值电压、开关比和迁移率等性能。④优化器件结构，提高FET的开关比和迁移率、减小阈值电压和亚阈值斜率，以满足平板显示器驱动的需要。本项目旨在对MgZnO/MgO MQWs的生长、物性调控及其高迁移率FET原型器件的性能作基础研究，探索二维纳米材料及平面器件中电子结构的一般规律及电输运机制。对推动新型平板显示器驱动FET技术具有积极的指导和借鉴作用。

中文关键词： MgxZn1-xO/MgO多量子阱；场效应晶体管；调制掺杂；；

英文摘要： The development of the new generation flat-panel display urgently needs high mobility field effect transistor (FET) as driving device.This project focus on the investigation of rock-salt (RS) MgZnO/MgO multiple-quantum-well (MQWs) and the high mobility MQWs-FET, carry out researches on the growth mechanism of RS-MgZnO and carrier control of MQW. The main research contents include: ① The growth of high quanlity RS-MgZnO/MgO MQWs by electron beam evaporation (EB) technology. ② Regulating and controlling the optical band-gap, electronic structure and electric properties of MQWs by optimizing structure and dopping. ③ Constructing MgZnO/MgO MQWs-FET, then measuring the performance of the FETs, including output characteristics, threshold voltage, switch ratio and mobility. ④ Optimizing the structure of FET to increase the switch ratio and mobility, reduce the threshold voltage and sub-threshold slope, which could meet the need of the driver for flat-panel display. This project is aimed at investigating the growth and property modification of MgZnO/MgO MQWs and the performance of high mobility MQWs-FET prototype devices, exploring the general rule of electron structure and electric transport mechanisms in 2D nanomaterials and planar devices. These works may play a guidance and reference role on pushing forward novel FE

英文关键词： MgxZn1-xO/MgO multiple quantum wells；Field effect transistor；Modulated doping；；