区域表面结构测量仪器尺度标定方法研究

项目名称： 区域表面结构测量仪器尺度标定方法研究

项目编号： No.51475150

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 机械、仪表工业

项目作者： 钟毓宁

作者单位： 湖北汽车工业学院

项目金额： 84万元

中文摘要： 随着精密工程的发展，表面结构及其特性已成为能否成功实现产品设计功能的主导因素，因而表面结构测量与表征越来越重要。区域表面结构能够更全面地反映表面的三维信息，但现有区域表面结构测量仪器基于不同的测量原理，导致测量对象相同而测量结果存在一定甚至明显的差异，难以满足科学研究和工程实践中的比对要求。为了实现不同测量原理的区域表面结构测量仪器尺度的标定，以及仪器之间性能的比对，本项目拟研究基于实物量具组件的区域表面结构测量仪器尺度标定方法。该方法基于一组具有特定结构的实物量具组件，对不同测量原理的区域表面结构测量仪器的多项综合指标进行标定，从而实现和满足比对要求。本项目的研究适用于微传感器、微机电系统（MEMS）、纳米电机系统（NEMS）、光学器件和精密、超精密机械零件等表面的区域表面结构测量仪器，在精密及超精密加工、半导体光刻和纳米工程等领域中，具有广泛的应用前景。

中文关键词： 实物量具；表面结构；区域表面结构测量仪器；尺度标定；比对

英文摘要： With the development of precision engineering, surface texture and its characteristics are turning into the dominant factors whether the product can achieve the design feature successfully. So the measurement and characterization of surface texture are becoming more and more important. The areal surface texture can reflect fully the 3D information of surface. The existing areal surface texture measurement instruments are based on different measurement principles which cause the same measured object with different or even obviously different measurement results, thus the comparison needs of science research and engineering practice are not satisfied. For the scale calibration of areal surface texture measurement instruments with different measurement principles and the function comparison between these instruments, this project intends to study the scale calibration methods of areal surface texture measurement instruments based on material measure sets. This method is based on a group of material measure sets with specially appointed structures to calibrate the multiple comprehensive indices of areal surface texture measurement instruments with different measurement principles, and then the comparison needs can be realized and satisfied. The study of this project is appropriate for the areal surface texture measurement instruments of these surface of micro-sensors,micro-electromechanical systems(MEMS), nano-electromechanical systems(NEMS),optical devices, precision and ultra-precision machine parts. Then it has a wide range of application prospects in precision and ultra-precision machining, semiconductor lithography and nano-engineering field.

英文关键词： material measure;surface texture;areal surafce texture measuring insrument;scale calibration;comparison